Nonvolatile semiconductor memory device

ABSTRACT

A non-volatile semiconductor memory device comprising a memory cell array having a plurality of electrically writable memory cells arranged in a matrix form, each of the memory cells having three or more logic states so as to store a multi-value data &#34;i&#34; (i=0, 1, . . . , n-1: n≧3), a plurality of data latch circuits for temporarily storing data controlling a write state of the plurality of memory cells of the memory array, write verify circuit for confirming the write state of the plurality of memory cells, and an &#34;i&#34; data batch verify circuit for batch-detecting whether or not the memory cell where data &#34;i&#34; should be written reaches a memory state of data &#34;i.&#34;

This application is a Continuation of application Ser. No. 09/290,995filed on Apr. 14, 1999, now U.S. Pat. No. 6,069,823; which is acontinuation of application Ser. No. 08/968,137 filed Nov. 12, 1997 nowU.S. Pat. No. 5,920,507 which is a continuation of application Ser. No.08/747,823 filed Nov. 13, 1996 now abandoned.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an electrically rewritable nonvolatilesemiconductor device (EEPROM) and particularly to an EEPROM in which amulti-value memory larger than one bit is stored in one memory cell.

2. Description of the Related Art

As one of electrically rewritable nonvolatile semiconductor memorydevices (EEPROM), an NAND type EEPROM in which a high integration can bemade is known. In this type of EEPROM, each of a plurality of memorycells has an n-channel FETMOS structure having a floating gate, as acharge storage layer, and a control gate. Then, adjacent memory cellshave a source and a drain in which are shared, and is connected inseries. The memory cells connected in this manner are to a bitline asone unit. A memory cell array is integrated on a p-type substrate or ap-type well formed on an n-type substrate. The drain side of an NANDcell is connected to the bitline through a select gate, and the sourceside is connected to a common source line through the select gate. Thecontrol gates of the memory cells are sequentially formed in a rowdirection, and used as a word line.

FIG. 1A is a plan view showing one NAND cell portion of the memory cellarray, and FIG. 1B is an equivalent circuit diagram. FIG. 2A is across-sectional view taken along line of 2A--2A of FIG. 1A, and FIG. 2Bis a cross-sectional view taken along line of 2B--2B of FIG. 1A.

A memory cell array having a plurality of NAND cells is formed on ap-type silicon substrate 11 (or p-type well), which is surrounded with adevice isolation oxide film 12. In this example, one NAND cell compriseseight memory cells M1 to M8, which are connected in series. Each of thememory cells comprises a floating gate (14₁ to 14₈) and a control gate16 (16₁ to 16₈). Each floating gate 14 is formed on the substrate 11through a tunnel insulating film 13, and each control gate 16 is formedthereon through a gate insulating film 15. An n-type diffusion layer 19is used as both source and drain, and the adjacent memory cells use then-type diffusion in common so as to be connected in series.

First select gates 14₉ and 16₉ are provided at the drain side of theNAND cell, and second select gates 14₁₀ and 16₁₀ are provided at thesource side of the NAND cell. The first select gates 14₉ and 16₉ areformed at the same time with the floating gates of the memory cells andthe control gates. The above-formed substrate is covered with a CVDoxide film 17, and a bitline 18 is formed thereon. The control gates 16of the NAND cell are provided as control gates CG1 to CG8 in common.These control gates are used as word lines.

The select gates 14₉, 16₉ and 14₁₀, 16₁₀ are sequentially formed in arow direction, and used as select gate SG1 and SG2, respectively.

FIG. 3 shows an equivalent circuit of the memory cell array having suchNAND cells arranged in a matrix form. One source line per 64 bitlines isconnected a substrate voltage line of Al, polysilicon, etc., through acontact. The substrate voltage line is connected to a peripheralcircuit. The control gates of the memory cell and the first and secondselect gates are sequentially formed in a row direction. Normally, a setof memory cells, in which a plurality of the memory cells are connectedto the control gates, is called as one page. Then, a set of pages, whichare sandwiched between a pair of select gates (first selection gate onthe drain side and second select gate on the source side) is called oneNAND block or simply one block.

An operation of an NAND cell type EEPROM will be explained as follows.

The data write operation is performed from the memory cell, which is farfrom the bitline, in order. A boosted voltage Vpp (=about 20V) isapplied to the control gate of the selected memory cell. An intermediatevoltage Vm (=about 10V) is applied to the control gates of the othernon-select memory cells and the first select gate. 0V ("0" state) or anintermediate potential ("1" state) is applied to the bitline inaccordance with data. At this time, the potential of the bitline istransmitted to the select cell. At the time of "0" state, a high voltageis applied to the floating gate of the select memory cell and thesubstrate. As a result, an electron is tunnel-injected to the floatinggate from the substrate, and a threshold voltage is moved to a positivedirection. At the time of "1" state, the threshold voltage is unchanged.

Data erasing is performed by the block unit at substantially the sametime. Specifically, all control gates of the blocks to be erased and theselect gates are set to "0" state, and a boosted voltage VppE (about20V) is applied to a p-type well and an n-type substrate. VppE is alsoapplied to the control gates of the blocks and the select gates, whichno erasing is performed. As a result, in the memory cells of the erasingblocks, the electron of the floating gate is discharged to the well andthe threshold voltage is moved to the a negative direction.

A data read operation is performed as follows.

Specifically, the control gate of the selected memory cell is set to "0"state, and the control gates of the other memory cells are set to apower-supply voltage Vcc (e.g., 3V). Then, the data read operation isperformed by detecting whether a current flows into the select memorycell or not. In a NAND cell type EEPROM, since the plurality of memorycells are connected in a cascade form, an amount of cell currents issmall at the reading time. Moreover, since the control gate of thememory cell and the first and second select gates are continuouslyarranged in a row direction, data for one page is simultaneously read tothe bitline.

Because of the limitation of the read operation, the threshold voltageafter write "1" state must be controlled to be between 0V to Vcc. Due tothis, a verify write is performed, only a memory cell in which "1" isinsufficiently written is detected. Then, rewrite data is provided toexecute a rewrite operation of only the memory cell in which "1" isinsufficiently written (verify write of each bit). The selected controlgate is set to, for example, 0.5V (verify voltage) to execute the verifyread, so as to detect the memory cell in which "1" insufficientlywritten.

In other words, if the threshold voltage of the memory cell is not 0.5Vor more, the current flows into the select memory cell, and the memorycell is detected as the memory cell in which "1" is insufficientlywritten. The current naturally flows into the memory cell of "0" state.Due to this, a verify circuit for compensating for the current flowinginto the memory cell is provided so that the memory cell is noterroneously recognized as the memory cell in which "1" insufficiently iswritten. A write verify is performed at a high speed by the verifycircuit.

The write and the write verify operations are repeated to execute thedata write operation, so that write time of each memory cell isoptimized, and the threshold voltage after write "1" must be controlledto be between 0V to Vcc.

In the above-explained NAND cell type EEPROM, there is proposed amulti-value memory cell storing three data "0", "1", "2" or more in astate after write operation (FIG. 4A). In this case, for example, in a"0" state, the threshold voltage is set to be negative. In a "1" state,the threshold voltage is set to from 0V to Vcc/2. In a "2" state, thethreshold voltage is set from Vcc2 to Vcc.

FIG. 4B shows a conventional verify read operation to check whether ornot write operation is sufficiently is performed in this type of ternarymemory cell.

In the write operation, after a write voltage (Vpp) is applied to thecontrol gate of the memory cell (steps S1, S2), a first verify readcycle (step S4) and a second verify read cycle (step S5) aresequentially performed. The first verify read cycle checks whether ornot "2" state is sufficiently written, and the second verify read cyclechecks whether or not "1" state is sufficiently written. A write pulseis applied to the memory cell in which data is insufficiently written(step S7). Thus, the verify first cycle, the verify second cycle, andthe rewrite are repeated until all memory cells are sufficiently written(steps S4 to S7).

The steps of the above-mentioned write operation are the same as thecase of a four-value memory cell shown in FIGS. 5A and 5B. Specifically,at the time of a verify read operation second cycle (step S4), and thirdverify read cycle (step S5) are sequentially performed. The first verifyread cycle checks whether or not "3" is sufficiently written (step 3),the second verify read cycle checks whether or not "2" is sufficientlywritten, and the third verify read cycle checks whether or not "1" issufficiently written.

However, in this type of EEPROM, the following problems exist in writeoperation.

Specifically, for example, in the ternary memory cell, data "1" whosewrite threshold value is small is sufficiently written. Thereafter, "2"is sufficiently written. According to the conventional write method, inthe memory cell in which "1" is written, after the memory cell in which"1" is written is sufficiently written, the unnecessary second verifyread cycle for checking whether or not "1" is sufficiently written isperformed until the writing of "2" is completed. As a result, verifyread time is increased, and the entire write time is increased.

In the case of the four-value memory cell, data "1" whose writethreshold value is small is first written. Thereafter, "2" writeoperation is sufficiently written, and "3" is sufficiently written.According to the conventional write method, in the memory cell in which"1" is written, after "1" is sufficiently written, the unnecessarysecond verify read cycle for checking whether or not "1" is sufficientlywritten is performed until the writing of "2" and "3" are completed.Then, in the memory cell in which "2" is written, after "2" issufficiently written, the unnecessary second verify read cycle forchecking whether or not "3" is sufficiently written is performed untilthe writing of "3" is completed. As a result, verify read time isincreased, and the entire write time is increased.

In the conventional nonvolatile semiconductor memory device (EEPROM),the following problems other than the above-mentioned problems peculiarto the multi-value storable EEPROM exist.

Specifically, in the NAND cell type EEPROM, the control gate of thememory cell selected at the time of data reading is set to 0V, and thecontrol gates of the other memory cells is set to Vcc (e.g., 3V) todetect whether or not a cell current Icell flows. In this case, theamount of the cell current is influenced by not only the thresholdvoltage to be read but also the threshold voltages of all residual cellsconnected in series. In the case of one NAND cell comprising eightmemory cells connected in series, all threshold voltages of eight cellsconnected in series are in a negative state ("1" state) if the amount ofthe cell current Icell (best) is the largest (the amount of resistanceis the smallest). If the amount of the cell current Icell (worst) is thesmallest (the amount of resistance is the largest), the memory cell(e.g., MC1 of FIG. 3) of the first bitline contact side is read as "1"when the threshold voltages of the other cells connected to the readcells in series are in a positive state ("0" state).

The cell current flows to the source line from the bitline through thememory cell. In the conventional memory cell array, the source is sharedin the NAND cell for one page to be read at the same time (FIG. 3). Forreading the memory cell, which is the farthest from the contact betweenthe source and the substrate voltage line (memory cell MC1 of FIG. 3),the following case is assumed.

Specifically, the threshold voltages of the other seven cells connectedto the memory cell MC in series, and the resistance of the other NANDcolumns having the source in column is minimum (the amount of the cellcurrent (best) is the largest). In this case, at an initial read time,the cell current flows from the small NAND column, and the resistance ofthe source line is large. As a result, the potential of the source lineof the NAND cell to which the memory cell MC1 belongs is set to I (I:cell current flowing at the initial read time, R: resistance of thesource line).

In other words, the source of the memory cell of the NAND columnincluding the memory cell MC floats from a ground potential Vss. As aresult, the voltage between the source and the drain of the memory celland the voltage between the source and gate. Moreover, since a substratebias effect occurs due to the float of the source from Vss, conductanceof the memory cell of the NAND cell column including MC1 is reduced.Thus, since the source line floats from the ground potential when theresistance of the source line is large, the cell current does not easilyflow in the NAND column in which the amount of the cell current issmall.

To read a negative threshold voltage of the memory cell, "1" state, itis needed that the bitline potential be reduced from a prechargepotential by ΔVB. The maximum value of bitline discharge time TRWL isdetermined when the amount of the cell current is the smallest. In acase where the source line does not float, TRWL=CB (bitlinecapacitance)/Icell (worst). In the above-mentioned memory cell, sincethe source line floats, TRWL is further increased, and random accesstime is increased.

In the conventional NAND cell type EEPROM, the bitlines having the samenumber as the number of the memory cell columns are provided in thecolumn direction as shown in FIG. 3. There is possibility that the sizeof the memory cell will be reduced in the column direction in the futureby a trench device separation technique (Aritome et. al., IEDM Tech.Dig. pp. 61 (1944)) and the like. Due to this, it will be difficult toprocess the bitline by the same pitch as the memory cell column.

For storing multi-value data in the conventional NAND cell type EEPROMand executing the verify write of each bit by the verify circuit, thefollowing verify read cycles are performed until the writing of all datais completed.

For example, at the time of the verify read, in the ternary memory cell,two verify read cycles are performed, and in the four-value memory cell,three verify read cycles are performed. As a result, verify read time isincreased, and the entire write time is increased.

In the conventional EEPROM, since the source line floats from the groundpotential, the bitline discharge time is increased, and the randomaccess time is also increased. Moreover, in the conventional EEPROM, thebitlines having the same number as the number of the memory cell columnsare provided in the column direction. However, if the size of the memorycell is reduced in the column direction by the trench device separationtechnique, it will be difficult to process the bitline by the same pitchas the memory cell column.

SUMMARY OF THE INVENTION

An object of the present invention is to provide an EEPROM in which anunnecessary verify read can be omitted when storing multi-value data sothat time needed for an entire write operation can be reduced.

Another object of the present invention is to provide a non-volatilesemiconductor memory device wherein resistance to a source line islowered so that the floating of the source line can be reduced so as toobtain a high speed random access.

Further, still another object of the present invention is to provide anon-volatile semiconductor memory device wherein a plurality of memorycell columns share bitlines so that a pitch between bitlines in a columndirection can be relaxed and a memory cell structure having high densitycan be realized.

According to the first aspect of the present invention, there isprovided a non-volatile semiconductor memory device comprising: a memorycell array having a plurality of electrically writable memory cellsarranged in a matrix form, each of the memory cells having three or morelogic states so as to store a multi-value data "i" (i=0, 1, . . . , n-1:n≧3); a plurality of data latch circuits for temporarily storing datacontrolling a write state of the plurality of memory cells of the memoryarray; write verify means for confirming the write state of theplurality of memory cells; and an data batch verify circuit forbatch-detecting whether or not the memory cell where data "i" should bewritten reaches a memory state of data "i."

Then, preferable manners of the first aspect of the present inventionwill be described as follows.

(1) in an electrical data write operation in which the write operationin accordance with the contents of the data latch circuits and the writeverify operation for confirming the write state of the memory cells arecontinued till the plurality of memory cells reach a predetermined writestate, when the "i" data batch verify circuit batch-detects the memorycell where data "i" should be written reaches the memory state of data"i", a write verify operation of data ("i" data verify read) is notperformed in the following write verify operation.

(2) In an electrical data write operation in which the write operationin accordance with the contents of the data latch circuits and the writeverify operation for confirming the write state of the memory cells arecontinued till the plurality of memory cells reach a predetermined writestate; when the "i" data batch verify circuit batch-detects that thereis not data "i" in write data input from an external section, a writeverify operation of data "i" ("i" data verify read) is not performed inthe following write verify operation.

In an electrical data write operation in which the write operation inaccordance with the contents of the data latch circuits and the writeverify operation for confirming the write state of the memory cells andthe renewal of the of the data latch circuits are continued till theplurality of memory cells reach a predetermined write state; when the"i" data batch verify circuit batch-detects that there is not data "i"in read data input from an external section, a write verify operation ofdata "i" ("i" data verify read) is not performed in the following writeverify operation.

(3) In an electrical data write operation in which the write operationin accordance with the contents of the data latch circuits and the writeverify operation for confirming the write state of the memory cells arecontinued till the plurality of memory cells reach a predetermined writestate, at a first write verify operation, "i" data verify read isperformed from i=1 to i=n-1 so as to confirm whether or not the memorycell where data "i" (i=1, 2, . . . , n-1) should be written reaches thememory state of data "i"; when a first data batch verify circuitbatch-detects that the memory cell where data "i" should be writtenreaches a memory state of data "1", "i" data verify read is performedfrom i=2 to i=n-1 in the following write verify operation so as toconfirm whether or not the memory cell where data "i" (i=2, 3, . . . ,n-1) should be written reaches the memory state of data "i"; when asecond data batch verify circuit batch-detects that the memory cellwhere data "2" should be written reaches a memory state of data "2", "i"data verify read is performed from i=3 to i=n-1 in the following writeverify operation so as to confirm whether or not the memory cell wheredata "i" (i=3, 4, . . . , n-1) should be written reaches the memorystate of data "i"; and finally, when an i-th (i=1 to n-2) data batchverify circuit batch-detects that the memory cell where data "i" (i=1 ton-2) should be written reaches a memory state of data "i", (n-1)th dataverify read is performed in the following write verify operation so asto confirm whether or not the memory cell where data "n-1" should bewritten reaches the memory state of data "n-1."

In an electrical data write operation in which the write operation inaccordance with the contents of the data latch circuits and the writeverify operation for confirming the write state of the memory cells andthe renewal of the of the data latch circuits are continued till theplurality of memory cells reach a predetermined write state; at a firstwrite verify operation, "i" data verify read is performed from i=1 toi=n-1 so as to confirm whether or not the memory cell where data "i"(i=1, 2, . . . , n-1) should be written reaches the memory state of data"i"; when a first data batch verify circuit batch-detects that thememory cell where data "1" should be written reaches a memory state ofdata "1", "i" data verify read is performed from i=2 to i=n-1 in thefollowing write verify operation so as to confirm whether or not thememory cell where data "i" (i=2, 3, . . . , n-1) should be writtenreaches the memory state of data "i"; when a second data batch verifycircuit batch-detects that the memory cell where data "2" should bewritten reaches a memory state of data "2", "i" data verify read isperformed from i=3 to i=n-1 in the following write verify operation soas to confirm whether or not the memory cell where data "i" (i=3, 4, . .. , n-1) should be written reaches the memory state of data "i"; andfinally, when an i-th (i=1 to n-2) data batch verify circuitbatch-detects that the memory cell where data "i" (i=1 to n-2) should bewritten reaches a memory state of data "i", (n-1)th data verify read isperformed in the following write verify operation so as to confirmwhether or not the memory cell where data "n-1" should be writtenreaches the memory state of data "n-1."

(4) The non-volatile semiconductor memory device further comprises datarenewal means for renewing the contents of the data latch circuits suchthat only a memory cell in which data is insufficiently written isrewritten in accordance with the contents of the data latch circuits andthe write state of the memory cell.

(5) In an electrical data write operation in which the write operationin accordance with the contents of the data latch circuits and the writeverify operation for confirming the write state of the memory cells andthe renewal of the of the data latch circuits are continued till theplurality of memory cells reach a predetermined write state; when the"i" data batch verify circuit batch-detects the memory cell where data"i" should be written reaches the memory state of data "i", a writeverify operation of data "i" ("i" data verify read) is not performed inthe following write verify operation.

(6) The data batch verify circuit includes a plurality of data batchdetective MOS transistor units connected to the data latch circuits, andthe plurality of data batch detective MOS transistor units are connectedin parallel.

(7) The data latch circuits include flip-flop circuits, the data batchdetective MOS transistor units include a plurality of data batchdetective MOS transistors whose gates are connected to the flip-flopcircuits, and the plurality of data batch detective MOS transistors areconnected in series.

(8) Each of the memory cells comprises a charge storage layer and acontrol gate on a semiconductor layer, and an NAND cell structure isformed by connecting the plurality of the memory cells in series.

(9) Each of the memory cells comprises a charge storage layer and acontrol gate formed on a semiconductor layer, and a NOR cell structureis formed.

(10) The data latch circuits include first, second, . . . , m (m is anatural number satisfying 2(m-1)<n≧2^(m)) latch circuits.

In the first aspect of the present invention, the data batch verifycircuit can detect whether or not a write state of each memory cellreaches a predetermined multi-value level after write operationmulti-value data. Then, if there is a memory cell, which does not reachthe predetermined multi-value level after write operation multi-valuedata, a bitline voltage needed at a write time is output in accordancewith a pre-determined write state such that a rewrite operation isprovided to on the memory cell. In a case of a ternary memory cell, ifall memory cells in which "1" state are written, the verify read forchecking whether or not "1" state is sufficiently written can be omittedin the following verify reading, so that the entire write time can bereduced. If the write operation and the verify read operation arerepeated so as to confirm that all memory cells reach a predeterminedwrite state, the data write operation is completed.

In a case of a four-value memory cell, if all memory cells in which "1"state are written, the verify read for checking whether or not "1" stateis sufficiently written can be omitted in the following verify reading.Moreover, if all memory cells in which "2" state are written, the verifyread for checking whether or not "2" state is sufficiently written canbe omitted in the following verify reading. Thus, the unnecessary verifyread is omitted,so that the entire write time can be reduced. If thewrite operation and the verify read operation are repeated so as toconfirm that all memory cells reach a predetermined write state, thedata write operation is completed.

As mentioned above, the verify read in data is sufficiently written isomitted in the following verify reading when writing the multi-valuememory cells. As a result, the unnecessary verify read can be omitted,so that the entire write time can be reduced and the write speed can beimproved.

According to the first aspect of the present invention, the writeoperation is repeated little by little as checking the degree of thewrite state. Further, regarding data whose write operation is completed("1" state in the case of the ternary memory cell), the unnecessaryverify read ("1" state is sufficiently written in the case of theternary memory cell) can be omitted thereafter, so that data writeoperation can be performed at high speed.

According to the second aspect of the present invention, there isprovided a non-volatile semiconductor memory device comprising: a memorycell array in which a plurality of memory cell units are arranged in amatrix form, the memory cell units each having a memory cell section andone or a plurality of select MOS transistors, the memory cell having oneor a plurality of non-volatile memory cells, and the select MOStransistors allowing the memory cell section to be electricallyconducted to a common signal line, wherein one end of each of the memorycell units is connected to a first common signal line in a state thatthe plurality of 2n (n≧2) memory cell units, sharing a word line, have acontact in common; and the other end of each of the memory cell units isconnected to a second common signal line in a state that n memory cellunits, sharing a word line and having no contact in common at one end ofthe memory cell unit, have a contact in common, and n memory cell units,sharing a contact at one end of the memory cell unit, have a contact incommon.

Also, there is provided a non-volatile semiconductor memory devicecomprising: a memory cell array in which a plurality of memory cellunits are arranged in a matrix form, the memory cell units each having amemory cell section and one or a plurality of select MOS transistors,the memory cell having one or a plurality of non-volatile memory cells,and the select MOS transistors allowing the memory cell section to beelectrically conducted to a common signal line, wherein n (n≧2) memorycell units are arranged in parallel so as to form a plurality ofparallel connected units, one end of each of arbitrary parallelconnected units is connected to a first common signal line in a statethat two parallel connected units, sharing a word line, have a contactin common; and the other end is connected to a second signal line in astate that two parallel connected units, sharing a word line and havingno contact in common at one end, have a contact in common.

Then, preferable manners of the second aspect of the present inventionwill be described as follows.

(1) The first common signal line, to which one end of each memory cellunit is connected, is set to a read potential, and the second commonsignal line, to which the other end of each memory cell unit isconnected, is set to a read non-select potential in reading the memorycell section of each of the memory cell units.

(2) The read non-select potential is a ground potential.

(3) The first common signal line, to which one end of each memory cellunit is connected, is set to a "i" write potential in accordance withwrite data "i" (i=0, 1, . . . , n: n≧1) in writing the writing sectionof each of the memory cell units.

(4) Each of the memory units comprises a memory cell section having oneor a plurality of non-volatile memory cells, two select MOS transistorsconnected in series so as to allow the memory cell section to beelectrically conducted to the first common signal line (first select MOStransistor connected to the first common signal line and second selectMOS transistor connected to the memory cell section), and two selecttransistors connected in series so as to allow the memory cell sectionto be electrically conducted to the second common signal line (thirdselect MOS transistor connected to the memory cell section and fourthselect transistor connected to the second common signal line); and atleast one of threshold voltages of the first to fourth select MOStransistors is different from the threshold voltages of the other selectMOS transistors.

(5) Each of the memory units comprises a memory cell section having oneor a plurality of non-volatile memory cells, two select MOS transistorsconnected in series so as to allow the memory cell section to beelectrically conducted to the first common signal line (first select MOStransistor connected to the first common signal line and second selectMOS transistor connected to the memory cell section), and two selecttransistors connected in series so as to allow the memory cell sectionto be electrically conducted to the second common signal line (thirdselect MOS transistor connected to the memory cell section and fourthselect transistor connected to the second common signal line); the firstselect MOS transistor has a first threshold voltage Vth1, the secondselect MOS transistor has a second threshold voltage Vth2, the thirdselect MOS transistor has a third threshold voltage Vth3, the fourthselect MOS transistor has a fourth threshold voltage Vth4, therebyforming a first memory cell unit; the first select MOS transistor has afifth threshold voltage Vth5, the second select MOS transistor has asixth threshold voltage Vth6, the third select MOS transistor has aseventh threshold voltage Vth7, the fourth select MOS transistor has aneighth threshold voltage Vth8, thereby forming a second memory cellunit; the first select MOS transistor has a ninth threshold voltageVth9, the second select MOS transistor has a tenth threshold voltageVth10, the third select MOS transistor has an eleventh threshold voltageVth11, the fourth select MOS transistor has a twelfth threshold voltageVth12, thereby forming a third memory cell unit; the first select MOStransistor has a thirteenth threshold voltage Vth13, the second selectMOS transistor has a fourteenth threshold voltage Vth14, the thirdselect MOS transistor has a fifteenth threshold voltage Vth15, thefourth select MOS transistor has a sixteenth threshold voltage Vth16,thereby forming a fourth memory cell unit; the first to fourth memorycell units form a sub-array in a state that a gate electrode of thefirst select MOS transistor, a gate electrode of the second select MOStransistor, a gate electrode of the third select MOS transistor, and agate electrode of the fourth select MOS transistor are shared as firstto fourth select gates, respectively; and at least one of first, fifth,ninth, thirteenth threshold voltages Vth1, Vth5, Vth9, Vth13 isdifferent from the other threshold voltages, at least one of second,sixth, tenth, fourteenth threshold voltages Vth2, Vth6, Vth10, Vth14 isdifferent from the other threshold voltages, at least one of third,seventh, eleventh, fifteenth threshold voltages Vth3, Vth7, Vth11, Vth15is different from the other threshold voltages, and at least one offourth, eighth, twelfth, sixteenth threshold voltages Vth4, Vth8, Vth12,Vth16 is different from the other threshold voltages.

(6) The first, sixth, eleventh, sixteenth threshold voltages Vth1, Vth6,Vth11, and Vth16 are equal to each other, and second to fifth, seventhto tenth, and twelfth to fifteenth threshold voltages Vth2 to Vth5, Vth7to Vth10, Vth12 to Vth15 are equal to each other.

(7) The first to fourth memory cell units are alternately arranged so ast o form the sub-array.

(8) The non-volatile semiconductor memory device further comprises: readselect gate voltage applying means for applying a read select gatevoltage to the gate electrodes of the first to fourth select MOStransistors of the selected sub-array such that at the time of readingthe memory cell section of the first memory cell unit, the first tofourth select MOS transistors of the first memory cell unit are madeconductive, at least one of the first to fourth select MOS transistorsof the second memory cell unit is made non-conductive, at least one ofthe first to fourth select MOS transistors of the third memory cell unitis made non-conductive, and at least one of the first to fourth selectMOS transistors of the fourth memory cell unit is made non-conductive;at the time of reading the memory cell section of the second memory cellunit, the first to fourth select MOS transistors of the second memorycell unit are made conductive, at least one of the first to fourthselect MOS transistors of the first memory cell unit is madenon-conductive, at least one of the first to fourth select MOStransistors of the third memory cell unit is made non-conductive, and atleast one of the first to fourth select MOS transistors of the fourthmemory cell unit is made non-conductive; at the time of reading thememory cell section of the third memory cell unit, the first to fourthselect MOS transistors of the third memory cell unit are madeconductive, at least one of the first to fourth select MOS transistorsof the first memory cell unit is made non-conductive, at least one ofthe first to fourth select MOS transistors of the second memory cellunit is made non-conductive, and at least one of the first to fourthselect MOS transistors of the fourth memory cell unit is madenon-conductive; and at the time of reading the memory cell section ofthe fourth memory cell unit, the first to fourth select MOS transistorsof the fourth memory cell unit are made conductive, at least one of thefirst to fourth select MOS transistors of the first memory cell unit ismade non-conductive, at least one of the first to fourth select MOStransistors of the second memory cell unit is made non-conductive, andat least one of the first to fourth select MOS transistors of the thirdmemory cell unit is made non-conductive.

(9) The non-volatile semiconductor memory device further comprises:write select gate voltage applying means for applying a write selectgate voltage to the gate electrodes of the first to fourth select MOStransistors of the selected sub-array such that at the time of writingthe memory cell section of the first memory cell unit, the first andsecond select MOS transistors of the first memory cell unit are madeconductive, at least one of the third and fourth select MOS transistorsis made non-conductive, at least one of the first and second select MOStransistors of the second memory cell unit is made non-conductive, atleast one of the first and second select MOS transistors of the thirdmemory cell unit is made non-conductive, and at least one of the firstand second select MOS transistors of the fourth memory cell unit is madenon-conductive; at the time of writing the memory cell section of thesecond memory cell unit, the first and second select MOS transistors ofthe second memory cell unit are made conductive, at least one of thethird and fourth select MOS transistors is made non-conductive, at leastone of the first and second select MOS transistors of the first memorycell unit is made non-conductive, and at least one of the first andsecond select MOS transistors of the third memory cell unit is madenon-conductive, and at least one of the first and second select MOStransistors of the fourth memory cell unit is made non-conductive; atthe time of writing the memory cell section of the third memory cellunit, the third and fourth select MOS transistors of the third memorycell unit are made conductive, at least one of the first and secondselect MOS transistors is made non-conductive, at least one of the thirdand fourth select MOS transistors of the first memory cell unit is madenon-conductive, at least one of the third and fourth select MOStransistors of the second memory cell unit is made non-conductive, andat least one of the third and fourth select MOS transistors of thefourth memory cell unit is made non-conductive; and at the time ofwriting the memory cell section of the fourth memory cell unit, thethird and fourth select MOS transistors of the fourth memory cell unitare made conductive, at least one of the first and second select MOStransistors is made non-conductive, at least one of the third and fourthselect MOS transistors of the first memory cell unit is madenon-conductive, at least one of the third and fourth select MOStransistors of the second memory cell unit is made non-conductive, andat least one of the third and fourth select MOS transistors of the thirdmemory cell unit is made non-conductive.

(10) Each of the memory cell sections comprises electrically rewritablenon-volatile memory cell.

(11) Each of the non-volatile memory cells comprises a charge storagelayer and a control gate formed on a semiconductor layer, and the memorycells are connected in series in a state that a plurality of adjacentmemory cells share a source and a drain, thereby forming the memory cellsection.

(12) Each of the non-volatile memory cells comprises a charge storagelayer and a control gate formed on a semiconductor layer, and the memorycells are connected in parallel in a state that one or a plurality ofmemory cells share a source and a drain, thereby forming the memory cellsection.

(13) Concentration of impurity material of a channel is changed so as tovary the threshold voltages of the first to sixteenth select MOStransistors.

In the second aspect of the present invention, both one end the otherend of the memory cell unit have a contact in common to the other memoryunits, respectively, and these ends are connected to the first andsecond common signal lines, respectively. The bitline, which compriseslow resistive polysilicon, Al, etc., is used in place of the sourceline, which comprises a conventional high resistive n-type diffusionlayer. As a result, the floating of the source line can be reduced so asto obtain a high speed random access.

Also, as a select MOS transistor for connecting the one end and theother end to the common signal lines, respectively, an E-type MOStransistor, an I-type MOS transistor, and a D-type MOS transistor aresuitably selected, so that the memory cell array which can obtain a highspeed random access, can be obtained without increasing a chip area.Moreover, since the plurality of memory cells can share the bitlines,the pitch between the bitlines in the column direction can be relaxed,so that the memory cell structure having high density can be realized.

Additional objects and advantages of the present invention will be setforth in the description which follows, and in part will be obvious fromthe description, or may be learned by practice of the present invention.The objects and advantages of the present invention may be realized andobtained by means of the instrumentalities and combinations particularlypointed out in the appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated in and constitute apart of the specification, illustrate presently preferred embodiments ofthe present invention and, together with the general description givenabove and the detailed description of the preferred embodiments givenbelow, serve to explain the principles of the present invention inwhich:

FIGS. 1A and 1B are a plan view and an equivalent circuit diagram eachshowing the cell structure of the conventional NAND type EEPROM;

FIGS. 2A and 2B are cross-sectional views each being taken along line of2A--2A of FIG. 1A and 2B--2B of FIG. 1A;

FIG. 3 is an equivalent circuit diagram of a memory cell array of theconventional NAND type EEPROM;

FIGS. 4A and 4B are views each showing the outline of the conventionalwrite operation;

FIGS. 5A and 5B are views each showing the outline of the conventionalwrite operation;

FIG. 6 is a view showing the outline of a write of a first embodiment ofthe present invention;

FIG. 7 is a view showing the outline of a write of a second embodimentof the present invention;

FIG. 8 is a view showing the outline of a write of a third embodiment ofthe present invention;

FIG. 9 is a view showing the outline structure of an EEPROM of fourthand fifth embodiments of the present invention;

FIG. 10 is a circuit diagram showing the specific structure of thememory cell array of the fourth embodiment of the present invention;

FIG. 11 is a circuit diagram showing the specific structure of a bitlinecontrol circuit of the fourth embodiment of the present invention;

FIG. 12 is a timing chart showing a read operation of the fourthembodiment of the present invention;

FIG. 13 is a timing chart showing a write of the fourth embodiment ofthe present invention;

FIG. 14 is a timing chart showing a verify read operation of the fourthembodiment of the present invention;

FIG. 15 is a view explaining the outline of a write of the fourth andfifth embodiments of the present invention;

FIG. 16 is a circuit diagram showing the specific structure of thebitline control circuit of the fifth embodiment;

FIG. 17 is a timing chart showing a read operation of the fifthembodiment of the present invention;

FIG. 18 is a timing chart showing a write of the fifth embodiment of thepresent invention;

FIG. 19 is a timing chart showing a verify read operation of the fifthembodiment of the present invention;

FIG. 20 is a circuit diagram showing the structure of the bitlinecontrol circuit of the fourth embodiment of the present invention;

FIG. 21 is a circuit diagram showing the structure of the bitlinecontrol circuit of the fifth embodiment of the present invention;

FIG. 22 is a circuit diagram showing the specific structure of thebitline control circuit of the sixth embodiment of the presentinvention;

FIG. 23 is a circuit diagram showing the specific structure of thebitline control circuit of the sixth embodiment of the presentinvention;

FIG. 24 is a block diagram showing the structure of a multi-valuestoring type EEPROM of an eighth embodiment of the present invention;

FIG. 25 is a circuit diagram showing the structure of a memory cellarray of FIG. 24 and a data circuit;

FIG. 26 is a view showing a distribution of a threshold value of amemory cell in a case of four-value storing;

FIG. 27 is a block diagram showing the specific structure of the datacircuit;

FIGS. 28A and 28B are views each explaining the outline of readingsteps;

FIG. 29 is a circuit diagram showing a specific example of the datacircuit;

FIG. 30 is a timing chart explaining a reading method of the eighthembodiment of the present invention;

FIG. 31 is a timing chart explaining the writing of the eighthembodiment of the present invention;

FIG. 32 is a timing chart explaining the write verify operation of theeighth embodiment of the present invention;

FIG. 33 is a timing chart explaining the write verify operation of theeighth embodiment of the present invention;

FIG. 34 is a circuit diagram showing a specific example of the datacircuit of a ninth embodiment of the present invention;

FIG. 35 is a block diagram showing the structure of a sub-array of aneleventh embodiment of the present invention;

FIG. 36 is a block diagram showing the structure of a memory cell arrayof the eleventh embodiment of the present invention;

FIG. 37 is a circuit diagram showing the structure of a memory cellarray of the eleventh embodiment of the present invention;

FIG. 38 is a circuit diagram showing the structure of a memory cellarray of the eleventh embodiment of the present invention;

FIGS. 39A to 39D are circuit diagrams each showing the structure of amemory cell portion of the eleventh embodiment of the present invention;

FIG. 40 is a block diagram showing the structure of an NAND type EEPROMof a twelfth embodiment of the present invention;

FIG. 41 is a circuit diagram showing the memory cell array of thetwelfth embodiment of the present invention;

FIG. 42 is a circuit diagram showing the memory cell array of thetwelfth embodiment of the present invention;

FIG. 43 is a timing chart explaining a data read operation of thetwelfth embodiment of the present invention;

FIG. 44 is a circuit diagram showing the bitline control circuit of thetwelfth embodiment of the present invention;

FIG. 45 is a circuit diagram showing the bitline control circuit of thetwelfth embodiment of the present invention;

FIG. 46 is a timing chart explaining the data read operation of thetwelfth embodiment of the present invention;

FIG. 47 is a timing chart explaining the data read operation of thetwelfth embodiment of the present invention;

FIG. 48 is a timing chart explaining the data read operation of thetwelfth embodiment of the present invention;

FIG. 49 is a timing chart explaining the data write operation of thetwelfth embodiment of the present invention;

FIG. 50 is a timing chart explaining the write verify operation of thetwelfth embodiment of the present invention; and

FIG. 51 is a circuit diagram showing the other example of the bitlinecontrol circuit of the twelfth embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the present invention will now be described withreference to the accompanying drawings.

First Embodiment

FIG. 6 is a view explaining a first embodiment of the present invention,and showing a write operation in a case of a ternary memory cell. InFIG. 6, the same reference numerals as the case of FIG. 4B are added tothe portions common to the case of FIG. 4A, and the explanation isomitted.

After a first write (step S2), a first verify read cycle for checkingwhether or not "2" state is sufficiently written (step S4₁) and a secondverify read cycle for checking whether or not "1" state is sufficientlywritten (step S5) are performed. If there is a memory cell ofinsufficient write in the memory cells in which "1" state is written, arewrite is performed (steps S6₁, S7₁), and the verify first and secondcycles (steps S4₁, S₅) are performed again. In the rewrite, the writeoperation is performed even in the memory cell in which "2" state isinsufficiently written.

The second verify read cycle is unnecessary after the memory cell inwhich "1" state is written is sufficiently written. Due to this, asshown in FIG. 6, only the first verify read cycle is performed until thememory cell in which "2" state is written is sufficiently written (stepS4₂, S6₂, S7₂).

According to this embodiment, the verify read for checking whether ornot "1" state is sufficiently written is not performed after the memorycell in which "1" state is written is sufficiently written. As a result,the entire write time can be largely reduced.

Second Embodiment

FIG. 7 is a view explaining a second embodiment of the present inventionin the case of the ternary memory cell. The second embodiment differsfrom the first embodiment in the point that the writing of the memorycell in which "2" state is written is completed faster than that of thememory cell in which "1" state is written.

If the writing of the memory cell in which "2" is written is completedfaster than that of the memory cell in which "1" is written (Yes in stepS6₁), the verify read for checking whether or not "2" is sufficientlywritten is not performed after the completion of the writing of thememory cell in which "2" is written. Only the second verify read cyclefor checking whether or not "1" is sufficiently written is performeduntil the memory cell in which "1" is written is sufficiently written(steps S7₃, S5₂, S6₄). If the writing of the memory cell in which "1" iswritten is completed faster than that of the memory cell in which "2" iswritten (Yes in step S6₂), similar to the first embodiment of FIG. 1,only the first verify read cycle is performed until the memory cell inwhich "2" is written is sufficiently written (steps 57₂, S4₂, S6₂).

According to this embodiment, after the completion of the writing of anyone of the memory cell in which "1" is written and the memory cell inwhich "2" is written, the verify read of the memory cell in which datais sufficiently written is not performed. As a result, the entire writetime is largely reduced.

Third Embodiment

FIG. 8 is a view explaining a third embodiment of the present inventionin the case of the four-value memory cell. Similar to the firstembodiment, the unnecessary verify read is omitted, so that the entirewrite time can be reduced. Specifically, after a first write (step S2),a first verify read cycle for checking whether or not "3" issufficiently written (step S3₁), a second verify read cycle for checkingwhether or not "2" is sufficiently written (step S4₁), and a thirdverify read cycle for checking whether or not "1" is sufficientlywritten (step S5) are performed. If there is a memory cell ofinsufficient write in the memory cells for "1", a rewrite is performed(steps S6₁, S71), and the verify first, second, and third cycles (stepsS3₁, S4₁, S5) are performed again. In the rewrite, the write operationis performed even in the memory cells in which "2" is insufficientlywritten and the memory cells in which "3" is insufficiently written.

The third verify read cycle is unnecessary after the memory cell inwhich "1" is written is sufficiently written. Due to this, the rewrite(step S7₂), the first verify read cycle (step S3₂), and the secondverify read cycle (step S4₂) are performed until the memory cell inwhich "2" is written is sufficiently written (step S6₂).

The second verify read cycle is unnecessary after the memory cell inwhich "2" is written is sufficiently written. Due to this, only therewrite (step S7₃) and the first verify read cycle (step S3₂) areperformed until the memory cell in which "3" is written is sufficientlywritten (step S6₃).

According to the present invention, in simultaneously writingmulti-value data (e.g., "1", "2", . . . , "6", "7"), the verify read isnot performed after data is already sufficiently written at the time ofthe previous verify read. As a result, the entire write time can bereduced. For example, in the case of 8-value memory cell, at the firstwrite, seven verify reads of data, "1", "2", . . . , "7", are performed.At the second write, six verify reads of data, "2", "3", . . . , "7",are performed. At the next write, five verify reads of data, "3", "4", .. . , "7", are performed.

As described in the second embodiment, for example, if the memory cellin which "3" is written is sufficiently written, six verify reads ofdata, "1", "2", "4", "5", "6", "7", may be performed at the secondwrite. Next, if the memory cell in which "2" is written is sufficientlywritten, five verify reads of data, "1", "4", "5", "6", "7", may beperformed.

In other words, every time when the writing of desirable data issufficiently written, the number of the verify reads can be reduced, sothat the entire write time can be reduced.

Fourth Embodiment

The following will explain a fourth embodiment of the present inventionshowing a case in which the present invention is applied to the ternarymemory cell of the NAND type EEPROM.

FIG. 9 is a block diagram showing the outline structure of the NAND celltype EEPROM of the fourth embodiment of the present invention.

A memory cell array 1 comprises a bitline control circuit 2 forcontrolling the bitline at read/write time, and a word line drivingcircuit 7 for controlling a word line potential. The bitline controlcircuit 2 and the word line driving circuit 7 are selected by a columndecoder 3 and a row decoder 8, respectively. The bitline control circuit2 receives and transmits from/to an input/output (I/O) data conversioncircuit 5 through a data input/output line (I/O line). The I/O dataconversion circuit 5 converts multi-value data of the read memory cellto binary data to be output to an external section. Or, the I/O dataconversion circuit 5 convert binary data input from the external sectionto multi-value data of the memory cell. The I/O data conversion circuit5 is connected to a data input/output buffer 5 for controlling datainput/output to/from the external section. A "1" data write operationcompletion detection circuit and data write operation completiondetection circuit 4 detects whether or not write of data "1" iscompleted and whether or not write of all data is completed.

FIGS. 10 and 11 show the specific structure of the memory cell array 1and the bitline control circuit 2. Memory cells M1 to M8 and selecttransistors S1 and S2 constitute an NAND type cell. One end of the NANDtype cell is connected to the bitline BL, and the other end is connectedto a common source line Vs. Selective gates SG1 and SG2, control gatesCG1 to CG8 are shared by a plurality of NAND type cells, and the memorycells using one control gate in common constitute one page.

The memory cell stores data in accordance with its threshold value Vt.Specifically, if Vt is below 0V, the memory cell stores data "0." If Vtis 0V to 1.5V or less, the memory cell stores data "1." If Vt is 1.5V ormore and less than power supply voltage, the memory cell stores data"2." Three data states can be provided by one memory cell, and ninecombinations of data can be formed by two memory cells. Among thesecombinations, by use of eight combinations, two memory cells can storedata for three bits. In this embodiment, the combination of two adjacentmemory cells using one control gate in common stores data for threebits. The memory cell array 1 is formed on a dedicated p-well.

Clock-synchronous type inverters C11, C12 and C13, C14 constituteflip-flops, respectively, to latch write/read data. These flip-flopsoperate as sense amplifiers. The flip-flop comprising inverters C11, C12latches data, "write "0" data or write "1" or "2" data?", as write data.Also, the flip-flop latches data, "the memory cell holds "0" data or thememory cell holds "1" or "2" data?" as read data. The flip-flopcomprising inverters C13, C14 latches data, "write "1" data or write "2"data?", as write data. Also, the flip-flop latches data, "the memorycell holds "2" data or the memory cell holds "0" or "1" data?" as readdata.

In the n-channel MOS transistors, Qn1 transfers a voltage VPR to thebitline when a precharge signal PRE is set to an "H" level. Qn2 connectsthe bitline to the main bitline control circuit when a bitlineconnection signal BLC is set to an "H" level. Qn3 to Qn6 and Qn9 to Qn12selectively transfer voltages VBLH, VBLM, BVLL to the bitline inaccordance with data latched by the above-described flip-flops. Qn7 andQn8 connect the flip-flop to the bitline when signals SAC2, SAC1 are setto an "H" level, respectively. Qn13 detects whether or not data for onepage latched by the flip-flops is all the same. Qn14, Qn15 and Qn16,Qn17 selectively connect the corresponding flip-flop to data I/O lineIOA, IOB, respectively, when column select signals CSL1, CSL2 are set toan "H" state. Qn13A and Qn13B are batch detective MOS transistors todetect whether or not the memory cells in which "1" of the same page iswritten are all sufficiently written.

The following will explain an operation of the above-structured EEPROMwith reference to FIGS. 12 to 14. FIG. 12 shows the timing of a readoperation, FIG. 13 shows the timing of a write operation, and FIG. 14shows the timing of a verify read operation. In any case, a control gateCG4 is selected.

<Read Operation>

The read operation is performed by two basic cycles as shown in FIG. 12.At the first read cycle, the voltage VPR is changed to the power supplyvoltage Vcc, and the bitline is precharged. The precharge signal PRE isset to an "L" level, and the bitline is floated. Sequentially, selectgates SG1, SG2, control gates CG1 to CG3, CG5 to CG8 are set to Vcc. Atthe same time, the control gate CG4 is set to 1.5V. Only when Vt of theselected memory cell is 1.5V or more, that is, data "2" is written, the"H" level of the bitline is maintained.

Thereafter, the levels of sense activation signals SEN2, SEN2B are setto "L", "H", respectively. The levels of latch activation signals LAT2,LAT2B are "L" and "H", respectively. As a result, the flip-flopcomprising the clock-synchronous type inverters C13 and C14 is reset.The level of the signal SAC2 is set to "H", and the flip-flop comprisingthe clock-synchronous type inverters C13 and C14 and the bitline areconnected. The levels of sense activation signals SEN2, SEN2B are set to"H", "L", respectively, so that the bitline potential is sensed.Thereafter, the levels of latch activation signals LAT2, LAT2B are "H"and "L", respectively. Then, data ""2" data, or "1" or "0" write" islatched by the flip-flop comprising the clock-synchronous type invertersC13 and C14.

The second read cycle is different from the first read cycle in thefollowing points.

Specifically, the voltage of the select control gate C4 is not 1.5V but0V. Signals SEN1, SEN1B, LAT1, LAT1B, and SAC1 are output in place ofsignals SEN2, SEN2B, LAT2, LAT2B, SAC2.

In the second read cycle, data ""2" data or, "1" or "2" write" islatched by the flip-flop comprising the clock-synchronous type invertersC11 and C12.

Data written in the memory cell is read by the above-explained two readcycles. Nodes N1 and N2 of the latches LAT1 and LAT2 are shown in thefollowing Table 1 wherein "H" is Vcc and "L" is Vss.

                  TABLE 1                                                         ______________________________________                                                "0"            "1"    "2"                                             ______________________________________                                        N1      H              L      L                                               N2      L              L      H                                               ______________________________________                                    

<Write Operation>

FIG. 13 shows the timing of the write operation. Write data istransferred to the latches LAT1 and TAT2 from IOA and IOB. Thepotentials of nodes N1 and N2 are shown in the following Table 2.

                  TABLE 2                                                         ______________________________________                                                "0"            "1"    "2"                                             ______________________________________                                        N1      L              H      H                                               N2      L              H      L                                               ______________________________________                                    

Prior to data write operation, data of the memory cell is erased, andthe threshold value Vt is set to below 0V. Data erasure is performedunder conditions that the p-well, the common source line VS, the selectgates SG1, SG2 are set to 20V, and the control gates CG1 to CG8 are setto 0V.

In the write operation, the level of the precharge signal PRE is set to"L", and the bitline is floated. The select gate SG1 is set to Vcc, andthe control gates CG1 to CG8 are set to Vcc. The select gate SG2 is setto 0V during the operation. At the same time, signals VRFY1, VRFY2, FIM,FIH are set to Vcc. In a case where "0" is written, data is latched bythe flip-flop comprising the clock-synchronous type inverters C11 andC12 such that the output level of the clock-synchronous type inverterC11 is set to "H." As a result, the bitline is charged by Vcc. In a casewhere "1" or "2" is written, the bitline is set to 0V.

Sequentially, the select gate SG1, the control gates CG1 to CG8, thesignal BLC, the signal VREY1, and the voltage VSA are set to 10V, thevoltage VBLH is set to 8V, and the voltage VBLM is set to 1V. In a casewhere "1" is written, data is latched by the flip-flop comprising theclock-synchronous type inverters C13 and C14 such that the output levelof the clock-synchronous type inverter C13 is set to "H." As a result,1V is applied to the bitline BL. On a case where "2" is written, thebitline is set to 0V. In a case where "0" is written, the bitline is setto 8V. Thereafter, the selected control gate CG4 is set to 20V.

In a case where "1" or "2" is written, an electron is injected to acharge storage layer of the memory cell by a potential differencebetween the bitline BL and the control gate CG4. As a result, thethreshold value of the memory cell is increased. In a case where "1" iswritten, an amount of charges to be injected to the charge storage layerof the memory cell must be lessened as compared with the case where "2"is written. Due to this, the bitline BL is set to 1V, and the potentialdifference between the bitline BL and the control gate CG4 is relaxed to19V. In this case, even if the potential difference is not relaxed, theoperation can be performed. In the case where "0" is written, thethreshold value of the memory cell is substantially unchanged by thebitline voltage of 8V.

When the write operation is completed, the select gate SG1 and thecontrol gates CG1 to CG8 are set to 0V, the voltage of the bitline,which was 8V when "0" was written, is reset to 0V later. If this orderis reversed, the state of the operation is temporarily set to a statethat "2" is written, and erroneous data is written when "0" is written.

<Write Verify Read>

To confirm the write state of the memory cell after the write operationand additionally write data only to the memory cell in which data isinsufficiently written, the verify read is performed. In thisembodiment, the ternary memory cell is used, and timing of the verifyread operation is shown by FIG. 14. The specific explanation of theoperation will be described later with reference to FIG. 15.

During the verify read, voltage VBLH is set to Vcc, and VBLL is set to0V, and FIM is set to 0V. Prior to the verify read, RENDB1 and RENDB2are precharged to a fixed potential, e.g., Vcc. Thereafter, RENDB1 andRENDB2 are kept to be floated.

The first verify read after the first write pulse is applied isperformed by two basic cycles. The basic cycles are similar to the firstread cycle. However, the difference between the basic cycles and thefirst read cycle lies in the point that the voltage of the selectedcontrol gate CG4 and the signals VRFY1, VRFY2, and FIH are output (onlyVERY1 is output at the first verify read cycle).

The signals VRFY1, VRFY2, and FIH are output before the signals SEN1,SEN1B, LAT1, LAT1B are set to "L", "H", "L", "H" respectively, after thegates SG1, SG2, and the control gates CG1 to CG8 are reset to 0V. Inother words, the signals VRFY1, VRFY2 and FIH are output after thepotential of the bitline is determined by the threshold value of thememory cell and before the flip-flop comprising the clock-synchronoustype inverters C11 and C12 is reset. The voltage of the selected controlgate CG4 is highly set to 2V (first cycle) and 0.5V (second cycle) toreserve a threshold margin of 0.5V against 1.5V (first cycle) at theread time and 0V (second cycle).

The following will explain the voltage of the bitline BL, which isdetermined by data 1, data 2, and the threshold value of the selectedmemory cell (data 1 is latched by the flip-flop comprising theclock-synchronous type inverters C11 and C12 and data 2 is latched bythe flip-flop comprising the clock-synchronous type inverters C13 andC14).

Data 1 is a signal for controlling ""0" data write, or "1" or "2" datawrite." In the case where "0" is written, Qn3 is in an "ON" state, andin the case where "1" or "2" is written, Qn6 is in an "ON" state. Data 2is a signal for controlling ""1" data or "2" data write." In the casewhere "1" is written, Qn10 is in an "ON" state, and in the case where"2" is written, Qn11 is in an "ON" state.

<Verify First Read Cycle>

In the first verify read cycle when "0" data is written (initial writedata is "0"), since data of the memory cell is "0", the bitlinepotential is set to "L" by the memory cell if the control gate CG4 is2V. Thereafter, if the signal VRFY1 is set to "H", the bitline BL is setto "H."

In the first verify read cycle when "1" data is written (initial writedata is "1"), since data of the memory cell is "1", the threshold valueof the memory cell is 1.5V or less. If the control gate CG4 is 2V, thebitline potential is set to "L." Thereafter, if the signal VRFY1 is setto "H", "1" data is already sufficiently written, and data 1 shows only"0" data write, the bitline BL is set to "H" ((1) of FIG. 14), or "L"((2) of FIG. 14).

In the first verify read cycle when "2" data is written (initial writedata is "2"), if data of the select memory cell is not "2" ("2" isinsufficiently written), the bitline potential is set to "L" ((5) ofFIG. 14) when the control gate CG4 is 2V. In a case where "2" issufficiently written in the select memory cell, the bitline potential is"H" as it is even if the control gate CG4 is 2V ((3), (4) of FIG. 14).(3) of FIG. 14 shows the case in which "2" is already sufficientlywritten and data 1 shows "0" data write. In this case, the signal VRFY1is set to "H", so that the bitline BL is recharged by the voltage VBH.

<Verify Second Read Cycle>

In the second verify read cycle when "0" data is written (initial writedata is "0"), since data of the memory cell is "0", the bitlinepotential is set to "L" when the control gate CG4 is 0.5V. Thereafter,the bitline BL is set to "H" when the signal VRFY1 is "H."

In the second verify read cycle when "1" data is written (initial writedata is "1"), if data of the select memory cell is not "1" ("1" isinsufficiently written), the bitline potential is set to "L" ((8) ofFIG. 14) when the control gate CG4 is 0.5V. In a case where "1" issufficiently written in the select memory cell, the bitline potential is"H" as it is even if the control gate CG4 is 0.5V ((6), (7) of FIG. 14).(6) of FIG. 14 shows the case in which "1" is already sufficientlywritten and data 1 shows "0" data write. In this case, the signal VRFY1is set to "H", so that the bitline BL is recharged by the voltage VBH.

In the second verify read cycle when "2" data is written (initial writedata is "2"), data of the memory cell is "2". Therefore, if thethreshold value of the memory cell is 0.5V or more, the bitlinepotential is "H" as it is even if the control sate is set to 0.5V ((9),(10) of FIG. 14). In a case where "2" data is insufficiently written andthe threshold value of the memory is below 0.5V, the bitline is set to"L" ((11) of FIG. 14).

Thereafter, in a case where the signals VRFY1, VRFY2, FIH are set to"H", so that "2" is already sufficiently written and data 1 shows "0"data write, the bitline BL is set to "H" ((9) of FIG. 14) or "L" ((10),(11) of FIG. 14).

By the above-explained verify read operation, write data and rewritedata from the write state of the memory cell are set as shown in thefollowing Table 3.

                  TABLE 3                                                         ______________________________________                                               Write data                                                                            00011222                                                              Cell data                                                                             01201012                                                              Rewrite data                                                                          00010220                                                       ______________________________________                                    

As is understood from Table 3, "1" data is written again in only thememory cell in which "1" is insufficiently written. Also, "2" data iswritten again in only the memory cell in which "2" is insufficientlywritten.

In the memory cell in which "1" is insufficiently written, since both N1and N2 are set to "H", Qn13A and Qn13B are "ON", so that RENDB2 isdischarged from the precharge potential. In other words, if there is atleast one memory cell in which "1" is insufficiently written, RENDB2 isset to "L." Then, even in the next verify read after the rewrite, it ischecked whether or not "1" data is sufficiently written.

If all the memory cells in which "1" is written are sufficientlywritten, node N1 is set to "L" at all columns for write "1." As aresult, Qn13A is turned "OFF", and RENDB2 keeps the precharge potential.In the other words, the "1" data write operation completion detectioncircuit 4 detects that "H" level of the potential of RENDB2 ismaintained. As a result, as shown in FIGS. 6 and 15, at the next verifyread (after the rewrite), only the verify read for checking whether ornot "2" data is sufficiently written is performed.

In the memory cells in which "0" or "2" is written, since N2 is set to"L", Qn13B is turned "OFF", and RENDB2 is not discharged from theprecharge potential. As a result, even in a case where all write data is"0" or "2", RENDB2 can keep "H" level. In the case of "0" data write, N1may be set to "L", and N2 may be set to "H." Since N1 is set to "L,"Qn13A is turned "OFF", the "H" level of RENDB2 can be maintained, andRENDB2 is not discharged from the precharge potential.

The following will explain the state in which the verify read forchecking whether or not the memory cell in which "1" data issufficiently written is omitted with reference to FIG. 15.

If "1" data is insufficiently written, the rewrite, the first verifyread cycle, the second verify read cycle are repeated as shown in FIG.15 since RENDB2 is in the "L" level.

Assuming that all the memory cells in which "1" is written aresufficiently written and that there is a memory cell in which "2" isinsufficiently written. Since RENDB2 is in the "H" level and RENDB1 isin the "L" level, only the verify read for checking whether or not "2"data is sufficiently written is performed at the next verify read (afterthe rewrite).

If data is sufficiently written in all memory cells, Qn13 of each columnis turned "OFF", and the level of RENDB1 is set to "H." The data writeoperation completion detection circuit 4 detects that the level ofRENDB1 is set to "H." As a result, data write operation completion datais output.

According to this embodiment, the unnecessary verify read operation isomitted, so that data write time can be largely reduced. The omission ofthe unnecessary verify read operation can be realized only by increasingthe number of transistors by two as compared with the conventional case.As a result, the increase in the area, which is necessary for realizingthe omission, is small.

Table 4 shows the potential of each part of the memory cell array ateach of the cases of erasure, write, read and verify read.

                  TABLE 4                                                         ______________________________________                                                      Read                                                                          first  second                                                                 cycle  cycle                                                                  only "2"                                                                             only "0" Verify read                                            Write    reading  reading  first                                                                              second                                 Erase    "0"   "1"    "2" time   time   cycle                                                                              cycle                            ______________________________________                                        BL    20V    8V     1V  0V  "H"    "L"    See FIG. 9                          SG1   20V    10V        5V          5V                                        CG1   0V     10V        5V          5V                                        CG2   0V     10V        5V          SV                                        CG3   0V     10V        5V          5V                                        CG4   0V     20V        1.5V   0V     2V   0.5V                               CG5   0V     10V        5V          5V                                        CG6   0V     10V        5V          5V                                        CG7   0V     10V        5V          5V                                        CG8   0V     10V        5V          5V                                        SG2   20V     0V        5V          5V                                        Vs    20V     0V        0V          0V                                        Pwell 20V     0V        0V          0V                                        ______________________________________                                    

Fifth Embodiment

FIG. 16 shows the specific structure of the memory cell array 1 and thebitline control circuit 2 of the NOR cell type EEPROM according to thefifth embodiment of the present invention.

The NOR type cell comprises only the memory cell M10. One end of the NORtype cell is connected to the bitline BL, and the other end is connectedto the common around line. The memory cell M having one control gate WLin common constitutes a page. The memory cell stores data in accordancewith its threshold value Vt. Specifically, if Vt is over Vcc, the memorycell stores data "0." If Vt is below Vcc, the memory cell stores data"1." If Vt is below 5V and more than 0V, the memory cell stores data"2."

Three data states can be provided by one memory cell, and ninecombinations of data can be formed by two memory cells. In thisembodiment, by use of eight combinations, two memory cells can storedata for three bits. The combination of two adjacent memory cells usingone control gate in common stores data for three bits.

Clock-synchronous type inverters C15, C16 and C17, C18 constituteflip-flops, respectively, to latch write/read data. These flip-flopsoperate as a sense amplifier. The flip-flop comprising inverters C15,C16 latches data, "write "0" data or write "1" or "2" data", as writedata. Also, the flip-flop latches data, "the memory cell holds "0" dataor the memory cell holds "1" or "2" data?" as read data. The flip-flopcomprising inverters C17, C18 latches data, "write "1" data or write "2"data", as write data. Also, the flip-flop latches data, "the memory cellholds "2" data or the memory cell holds "0" or "1" data?" as read data.

In the n-channel MOS transistors, Qn18 transfers a voltage VPR to thebitline when a precharge signal PRE is set to an "H" level. Qn19connects the bitline to the main bitline control circuit when a bitlineconnection signal BLC is set to an "H" level. Qn20 to Qn23 and Qn25 toQn28 selectively transfer voltages VBLH, VBLM, 0V to the bitline inaccordance with data latched by the above-described flip-flops. Qn24 andQn29 connect the flip-flop to the bitline when signals SAC2, SAC1 areset to an "H" level, respectively. Qn30 detects whether or not data forone page latched by the flip-flops is all the same. Qn35 and Qn36 arebatch detective MOS transistors to detect whether or not the memorycells in which "1" of the same page is written are all sufficientlywritten. Qn31, Qn32 and Qn33, Qn34 selectively connect the correspondingflip-flop to data I/O line IOA, IOB, respectively, when column selectsignals CSL1, CSL2 are set to an "H" state.

The following will explain an operation of the above-structured EEPROMwith reference to FIGS. 17 to 19. FIG. 17 shows the timing of a readoperation, FIG. 18 shows the timing of a write operation, and FIG. 19shows the timing of a verify read operation.

<Read Operation>

The read operation is performed by two basic cycles as shown in FIG. 17.At the first read cycle, the voltage VPR is changed to the power supplyvoltage Vcc, and the bitline is precharged. The precharge signal PRE isset to an "L" level, and the bitline is floated. Sequentially, thecontrol gate WL is set to 2.5V. Only when Vt of the selected memory cellis 2.5V or less, that is, data "2" is written, the "L" level of thebitline is maintained.

Thereafter, the levels of sense activation signals SEN2, SEN2B are setto "L", "H", respectively. The levels of latch activation signals LAT2,LAT2B are "L" and "H", respectively. As a result, the flip-flopcomprising the clock-synchronous type inverters C17 and C18 is reset.The level of the signal SAC2 is set to "H", and the flip-flop comprisingthe clock-synchronous type inverters C17 and C18 and the bitline areconnected to each other. The levels of sense activation signals SEN2,SEN2B are set to "H", "L", respectively, so that the bitline potentialis sensed. Thereafter, the levels of latch activation signals LAT2,LAT2B are "H" and "L", respectively. Then, data ""2" data, or "1" or "0"write" is latched by the flip-flop comprising the clock-synchronous typeinverters C17 and C18.

The second read cycle is different from the first read cycle in thefollowing points.

Specifically, the voltage of the select control gate WL is not 2.5V butVcc. Signals SEN1, SEN1B, LAT1, LAT1B, and SAC1 are output in place ofsignals SEN2, SEN2B, LAT2, LAT2B, SAC2.

In the second read cycle, data ""0" data or, "1" or "2" write" islatched by the flip-flop comprising the clock-synchronous type invertersC15 and C16.

Data written in the memory cell is read by the above-explained two readcycles.

<Write Operation>

Prior to data write, data of the memory cell is erased, and thethreshold value Vt of the memory cell is Vcc or more. At the erasuretime, the control gate WL is set to 20V, and the bitline is set to 0V.The potentials of nodes N1 and N2 of the flip-flop circuits provided inthe bitline control circuit of FIG. 16 are shown in the following Table5.

                  TABLE 5                                                         ______________________________________                                                "0"            "1"    "2"                                             ______________________________________                                        N1      L              H      H                                               N2      L              H      L                                               ______________________________________                                    

In the write operation, as shown in FIG. 18, the level of the prechargesignal PRE is set to "L", and the bitline is floated. The signals VRFY1,VRFY2, FIM, FIL are set to Vcc. In a case where "0" is written, data islatched by the flip-flop comprising the clock-synchronous type invertersC15 and C16 such that the output level of the clock-synchronous typeinverter C15 is set to "H." As a result, the bitline is set to 0V. In acase where "1" or "2" is written, the bitline is charged to Vcc.

Sequentially, the signals BLC, VRFY2, FIM, FIL and the voltage VSA areset to 10V, the voltage VBLH is set to 8V, and the voltage VBLM is setto 7V. In a case where "1" is written, data is latched by the flip-flopcomprising the clock-synchronous type inverters C17 and C18 such thatthe output level of the clock-synchronous type inverter C17 is set to"H." As a result, 7V is applied to the bitline BL. In a case where "2"is written, the bitline is set to 8V. In a case where "0" is written,the bitline is set to 0V. Thereafter, the selected control gate WL isset to -12V.

In a case where "1" or "2" is written, an electron is injected to acharge storage layer of the memory cell by a potential differencebetween the bitline BL and the control gate WL. As a result, thethreshold value of the memory cell is reduced. In a case where "1" iswritten, an amount of charges to be injected to the charge storage layerof the memory cell must be lessened as compared with the case where "2"is written. Due to this, the bitline BL is set to 7V, and the potentialdifference between the bitline BL and the control gate WL is relaxed to19V. In the case where "0" is written, the threshold value of the memorycell is substantially unchanged by the bitline voltage of 0V.

<Verify Read Operation>

To confirm the write state of the memory cell after the write operationand additionally write data only to the memory cell in which data isinsufficiently written, the verify read is performed. The timing of theverify read operation is shown in FIG. 19, and the outline of theoperation is shown in FIG. 15 previously explained. During the verifyreading, the voltage VBLH is Vcc, and the FIM is 0V.

The verify read is performed by two basic cycles. The basic cycles aresimilar to the read cycle. The difference between the basic cycles andthe read cycle lies in the following point.

Specifically, the voltage of the selected control gate WL and thesignals VRFY1, VRFY2, and FIH are output (only VERY1 is output at thefirst verify read cycle).

The signals VRFY1, VRFY2, and FIH are output before the signals SEN1,SEN1E, LAT1, LAT1B are set to "L", "H", "L", "H", respectively, afterthe control gate WL is reset to 0V. In other words, the signals VRFY1,VRFY2 and FIH are output after the potential of the bitline isdetermined by the threshold value of the memory cell and before theflip-flop comprising the clock-synchronous type inverters C15 and C16 isreset. The voltage of the selected control gate WL is set to be low,e.g., 2V (first cycle) 4V (second cycle) to reserve a threshold marginagainst 2.5V (first cycle) at the read time and Vcc (second cycle).

The following will explain the voltage of the bitline BL, which isdetermined by data 1, data 2, and the threshold value of the selectedmemory cell (data 1 is latched by the flip-flop comprising theclock-synchronous type inverters C15 and C16 and data 2 is latched bythe flip-flop comprising the clock-synchronous type inverters C17 andC18).

Data 1 is a signal for controlling ""0" data, or "1" or "2" data write."In the case where "0" is written, Qn20 is in an "ON" state, and in thecase where "1" or "2" is written, Qn23 is in an "ON" state. Data 2 is asignal for controlling ""1" data or "2" data write." In the case where"1" is written, Qn26 is in an "ON" state, and in the case where "2" iswritten, Qn27 is in an "ON" state.

<Verify First Read Cycle>

In the first verify read cycle when "0" data is written (initial writedata is "0"), since data of the memory cell is "0", the level of thebitline potential is set to "H" even if the control gate WL is 2V.Thereafter, the signal VRFY1 is set to "H", so that the level of thebitline BL is set to "L."

In the first verify read cycle when "1" data is written (initial writedata is "1"), since data of the memory cell is "1", the threshold valueof the memory cell is 2.5V or more. Even if the control gate WL is 2V,the level of the bitline potential is maintained to be "H." Thereafter,if the signal VRFY1 is set to "H", "1" data is already sufficientlywritten, and data 1 shows only "0" data write, the level of the bitlineBL is set to "L" ((2) of FIG. 19), or "H" ((1) of FIG. 19).

In the first verify read cycle when "2" data is written (initial writedata is "2"), if data of the select memory cell is not "2" ("2" isinsufficiently written), the level of the bitline potential is "H" ((3)of FIG. 19) even when the control gate WL is 2V. In a case where "2" issufficiently written in the select memory cell, the level of the bitlinepotential is set to "L" when the control gate WL is 2V ((4), (5) of FIG.19). (5) of FIG. 19 shows the case in which "2" is already sufficientlywritten and data 1 shows "0" data write. In this case, the level of thesignal VRFY1 is set to "H", so that the bitline BL is grounded.

<Verify Second Read Cycle>

In the second verify read cycle when "0" data is written (initial writedata is "0"), since data of the memory cell is "0", the level of thebitline potential is set to "H" even if the control gate CG is 4V.Thereafter, the signal VRFY1 is set to "H", so that the level of thebitline BL is set to "L."

in the second verify read cycle when "1" data is written (initial writedata is "1"), in a case where data of the memory cell is not "1" ("1" isinsufficiently written), the level of the bitline potential is "H" evenif the control gate WL is 4V ((6) of FIG. 19). In a case where "1" issufficiently written, the level of the potential value is "L" if thecontrol gate WL is 4V ((7), (8) of FIG. 19). (8) of FIG. 19 shows thecase in which "1" is already sufficiently written and data 1 shows "0"data write. In this case, the level of the signal VRFY1 is set to "H",so that the bitline BL is grounded.

In the first verify read cycle when "2" data is written (initial writedata is "2"), data of the memory cell is "2." Due to this, if thethreshold value of the memory cell is 4V or less and "2" isinsufficiently written, the level of the bitline potential is "L" whenthe control gate WL is 4V ((10), (11) of FIG. 19). In a case where "2"is insufficiently written and the threshold value of the memory cell is4V or more, the level of the bitline is "H" ((9) of FIG. 19).

Thereafter, if the signals VRFY1, VRFY2, FIH are set to "H", "2" data isalready sufficiently written, and data 1 shows only "0" data write, thelevel of the bitline BL is set to "H" ((11) of FIG. 19), or "H" ((9),(10) of FIG. 19).

By the above-explained verify read operation, similar to the fourthembodiment, write data and rewrite data are set as shown Table 3.

In this case, in the memory cell which "1" is insufficiently written,since both N1 and N2 are in the "H" level, Qn35 and Qn36 are turned"ON", and RENDB2 is discharged from the precharge potential. Even ifthere is one memory cell in which "1" is insufficiently written, RENDB2is set to an "L" level. Then, it is checked whether or not "1" issufficiently written in the next verify read (after the rewrite).

If all the memory cells in which "1" is written are sufficientlywritten, node N1 is set to "L" at all columns for write "1." As aresult, Qn35 is turned "OFF", and RENDB2 can keep the prechargepotential. In the other words, the "1" data write operation completiondetection circuit 4 detects that "H" level of the potential of RENDB2 ismaintained. As a result, as shown in FIGS. 6 and 15, at the next verifyread (after the rewrite), only the verify read for checking whether ornot "2" data is sufficiently written is performed.

In the memory cells in which "0" or "2" is written, since N2 is set to"L", Qn36 is turned "OFF", and RENDB2 is not discharged from theprecharge potential. As a result, even in a case where all write data is"0" or "2", RENDB2 can keep "H" level. In the case of "0" data write, N1may be set to "L", and N2 may be set to "H." Since N1 is set to "L,"Qn35 is turned "OFF", the "H" level of RENDB2 can be maintained, andRENDB2 is not discharged from the precharge potential.

The following will explain the state in which the verify read forchecking whether or not the memory cell in which "1" data issufficiently written is omitted with reference to FIG. 15. If ""1" datais insufficiently written, the rewrite, the first verify read cycle, thesecond verify read cycle are repeated as shown in FIG. 15 since RENDB2is in the "L" level.

Assuming that all the memory cells in which "1" is written aresufficiently written and that there is a memory cell in which "2" isinsufficiently written. Since RENDB2 is in the "H" level and RENDB1 isin the "L" level, only the verify read for checking whether or not "2"data is sufficiently written is performed at the next verify read (afterthe rewrite)

If data is sufficiently written in all memory cells, Qn30 of each columnis turned "OFF", and the level of RENDB1 is set to "H." The data writeoperation completion detection circuit 4 detects that the level ofRENDB1 is set to "H." As a result, data write operation completion datais output.

Table 6 shows the potential of each part of the memory cell array ateach of the cases of erasure, write, read and verify read.

                  TABLE 6                                                         ______________________________________                                                    Read                                                                          first  second                                                                 cycle  cycle                                                                  only "2"                                                                             only "2" Verify read                                       Write         reading  reading  first  second                                 Erase  "0"   "1"   "2"  time   time   cycle  cycle                            ______________________________________                                        BL   0 V   0 V   7 V 8V   "L"    "H"    See FIG. 14                           WL  20 V   -12 V      2.5 V  5 V    2.0 V  4.0 V                              ______________________________________                                    

The circuits shown in FIGS. 11 and 16 can be deformed as shown in FIGS.20 and 21, respectively. FIG. 20 shows a case in which n-channeltransistors Qn3 and Qn4 are replaced with p-channel transistors Qp1 andQp2. FIG. 21 shows a case in which n-channel transistors Qn22, Qn23,Qn25 to Qn28 are replaced with p-channel transistors Qp3 to Qp8. As aresult, it is possible to prevent the drop of the voltage, which can betransferred in accordance with the threshold voltage of the n-channeltransistors. In this example, the voltage VSA may be increased up to 8V,so that the breakdown voltage of the transistors constituting thecircuit can be reduced. VRFY1B of FIG. 20 is a reverse signal of VRFY1of FIG. 11, and VRFY2B, FILB, and FIMB of FIG. 21 are reverse signals ofVRFY2, FIL, and FIM of FIG. 16, respectively.

Sixth Embodiment

The following will explain the specific example in which two kinds ofdetections are performed in the case where the ternary memory cell isused similar to the second embodiment Specifically, one is a detectionof the write operation completion of the memory cell in which "1" iswritten, and the other is a detection of the write operation completionof the memory cell in which "2" is written.

FIG. 22 shows a case in which the present invention is applied to theNAND type EEPROM, FIG. 23 shows a case in which the present invention isapplied to the NOR type EEPROM. The difference between the sixthembodiment and the fourth and fifth embodiments lines in the followingpoint.

Specifically, the detector of the write operation completion of thememory cell in which "2" is written is provided in addition to thedetector of the write operation completion of the memory cell in which"1" is written.

In FIGS. 22 and 23, a first data batch detective MOS transistor unit(Qn13A, Qn13B of FIG. 22 and Qn35, Qn36 of FIG. 23) is a circuit fordetecting the write operation completion of the memory cell in which "1"is written. A second data batch detective MOS transistor unit (Qn13C,Qn13D of FIG. 22 and Qn37, Qn38 of FIG. 23) is a circuit for detectingthe write operation completion of the memory cell in which "2" Uswritten.

Similar to the fourth and fifth embodiments, RENDB1 is a signal fordetecting the write operation completion of all data. RENDB2 is a signalfor detecting whether or not the memory cell in which "1" is written issufficiently written.

RENDB4 is a signal for detecting whether or not the memory cell in which"2" is written is sufficiently written. "2" data write operationcompletion batch detection may be performed in the same as the "1" datawrite operation completion batch detection, which is already describedin the fourth and fifth embodiments.

Prior to the batch detection, RENDB4 is precharged to a constantpotential. In the memory cell in which "2" is written, since N3 is setto the "H" level, MOS transistor Qn13D of FIG. 22 (Qn38 of FIG. 23) isturned "ON." As described in the fourth and fifth embodiments, since N1of the memory cell in which "2" is written is set to the "L" level,Qn13C of FIG. 22 (Qn37 of FIG. 23) is turned "OFF," so that RENDB4 keepsthe precharge potential. In the case of the memory cell in which "2" isinsufficiently written, since N1 of the memory cell is set to the "H"level, Qn13C of FIG. 22 (Qn37 of FIG. 23) is turned "ON", so that RENDB4is discharged from the precharge potential. In the case of the memorycell in which "0" is written, since N1 of the memory cell is set to the"L" level, Qn13C of FIG. 22 (Qn37 of FIG. 23) is turned "OFF," so thatRENDB4 keeps the precharge potential. In the case of the memory cell inwhich "1" is written, N3 is set to the "L" level regardless of the writestate, that is, sufficient write or insufficient write. As a result,RENDB4 keeps the precharge potential.

As mentioned above, by detecting RENDB4, it is possible to detectwhether or not the memory cell in which "2" is written is sufficientlywritten. The outline of the write operation may be performed asexplained in the second embodiment.

Seventh Embodiment

According to the present invention, in write data to the multi-valuememory cell, the data batch detective MOS transistor unit can detect thewrite operation completion of the memory cell in which "1" is writtenand the write operation completion of the memory cell in which "2" iswritten. The data batch detective MOS transistor unit is connected tothe bitline control circuit. If there is no "1" write data in, forexample, the ternary memory cell, the verify read for "1" write data canbe omitted from the beginning.

As shown in FIG. 22, RENDB2 and RENDB4 are precharged before inputtingwrite data to the bitline control circuit. Thereafter, data is loaded tothe latch circuit comprising inverters C11, C12, C13, and C14.

If there is no "1" in write data, at least one of N1 and N2 is set tothe "L" level, and at least one of Qn13B or Qn13A is turned "OFF", sothat RENDB2 keeps the precharge potential. In the bitline controlcircuit for write data "1", both N1 an N2 are set to the "H" level, sothat RENDB2 is discharged from the precharge potential.

By detecting the potential of RENDB2, it is possible to detect whetheror not there is "1" write data. If there is no "1" write data, theverify read for checking whether or not "1" is sufficiently written maynot be performed from the beginning.

Similarly, RENDB4 is precharged before the data load. Then, after thedata load to the bitline control circuit, the potential of RENDB4 isdetected, thereby making it possible to detect whether or not "2" datais written. In other words, if there is no "2" write data, RENDB4 keepsthe precharge potential. If there is "2" write data, RENDB4 isdischarged from the precharge potential. Then, the potential of RENDB4may be detected. Thus, if RENDB4 is discharged, the verify read forchecking whether or not "2" is sufficiently written may not be performedfrom the beginning. By omitting the unnecessary verify read, the entirewrite time can be reduced.

Eighth Embodiment

This embodiment will specifically explain the four-value memory celldescribed in the third embodiment.

The flow chart showing the write operation is the same as FIG. 8.According to this embodiment, the unnecessary verify read is omitted, sothat the entire write time is reduced. Specifically, after the firstwrite, the first verify read cycle, the second verify read cycle, andthe third verify read cycle are performed. The first verify read cyclechecks whether or not "3" is sufficiently written. The second verifyread cycle checks whether or not "2" is sufficiently written. The thirdverify read cycle checks whether or not "1" is sufficiently written.

If there is a memory cell in which "1" is insufficiently written, arewrite is performed. In the rewrite operation, the write operation isperformed even in the memory cell in which "2" is insufficiently writtenand the memory in which "3" is insufficiently written.

The third verify read cycle is unnecessary after the memory cell inwhich "1" is written is sufficiently written. Due to this, as shown inFIG. 8, until the memory cell in which "2" is written is sufficientlywritten, the rewrite, the first verify read cycle, and the second verifyread cycle are performed.

The second verify read cycle is unnecessary after the memory cell inwhich "1" is written is sufficiently written. As shown in FIG. 8, untilthe memory cell in which "3" is written is sufficiently written, onlythe rewrite and the first verify read cycle are performed.

The following will explain the case in which the present invention isapplied to the four-value memory cell of NAND type EEPROM.

FIG. 24 shows the structure of the multi-value storable type EEPROMaccording to the eighth embodiment of the present invention. In thememory cell array 1 in which the memory cells are arranged in the matrixform, there is provided a control gate and select gate driving circuit 9to select the memory cell or to apply a write voltage and a read voltageto the control gate. The circuit 9 is connected to an address buffer 11so as to receive an address signal. A data circuit 10 stores write dataand reads data of the memory cell. The circuit 10 is connected to thedata I/O buffer 6 to receive an address signal from the address buffer11. The data I/O buffer 6 controls the data input and output to/from theexternal section of the EEPROM.

FIG. 25 shows the memory cell array 1 shown in FIG. 24 and the datacircuit 10. The memory cells M1 to M4 are connected in series so as toconstitute an NAND cell type cell. The both ends of the NAND cell typecell are connected to the bitline BL and the source line Vs throughselect transistors S1 and S2, respectively. The group of the memorycells M using the control gate CG in common forms a unit, which iscalled "page", and writes and reads data. A block is formed by the groupof the memory cells expanding to four control gates CG1 to CG4. Each of"page" or "block" is selected by the circuit 9. Each of the data circuit10-0 to 10-m is connected to each of the bitlines BL0A to BLmA, andtemporarily stores write data to the corresponding memory cell. In thisembodiment, since an open-bitline arrangement is used, the bitlines BL0Bto BLmB are connected to the data circuits, respectively.

FIG. 26 shows the relationship between the threshold voltage of thememory cell M and four write states (four level data "0", "1", "2","3"). The data "0" state is the same as the state after an erasure isperformed. For example, the data "0" state has a negative thresholdvalue. The data "1" state has a threshold value between 0.5V to 0.8V.The data "2" state has a threshold value between 1.5V to 1.8V. The data"3" state has a threshold value between 2.5V to 2.8V.

Read voltage VCG2R is applied to the control gate CG of the memory cellM and the memory cell is turned "ON" or "OFF", so that data of thememory cell can be detected to be "0", "1", "2", or "3." Sequentially,read voltages VCG3R, VCGIR are applied to the control gate CG, so thatdata of the memory cell is completely detected. For example, readvoltages VCG1R, VCG2R, and VCG3R are 0V, 1V, and 2V, respectively. Theseread voltages VCG1R, VCG2R, and VCG3R are called verify voltages. At adata write time, these read verify voltages are applied to the controlgate to detect the state of the memory cell M. As a result, it ischecked whether or not write data is completely performed. For example,these verify voltages are set to 0.5V, 1.5V, 2.5V, respectively.

FIG. 27 shows the data circuit including two latch circuits (first andsecond latch circuits). In write data, two-bit write data is stored inthese two latch circuits. In reading data, read four-value data isstored in these two latch circuits, and output to the external sectionof the chip through I/O1 and I/02.

The following will explain a case in which 512-bit data (column addressA0, A1, A2, . . . , A510, A511) is write and read.

<Write>

First, write data of head address A0 is input to a first latch circuitRT1-0 so as to be stored. Sequentially, write data of address A1, A2, .. . , A254, A255 is input to latch circuits RT1-1, RT1-2, . . . ,RT1-254, RT1-255, respectively, so as to be stored. Then, write data ofaddress A256, A257, . . . , A510, A511 is input to latch circuits RT2-0,RT2-1, . . . , RT2-254, RT2-255, respectively, so as to be stored.Thereafter, data write to the memory cell is performed in accordancewith two-bit write data stored in these two latch circuits of the datacircuit.

If data of below 512 bits, write data is input to the first latchcircuit of the data circuit. However, write data is not input to thesecond latch circuit. In this case, write data may be input to thesecond latch circuit such that the write state of the memory cell is setto "0" state having the low threshold value or "1" state.

<Read>

FIGS. 28A and 28B show data read steps.

First of all, a voltage Vp1, which is between "1" state and "2" state,is applied to the word line of the read memory cell. If the memory cellis in a conductive state, data is "0" or "1." If the memory cell is in anon-conductive state, data is "2" or "3." Then, read data correspondingto the column addresses A0, A1, A2, . . . , A254, A255 is stored in thefirst latch circuit (step A1).

Next, if Vp2 is applied to the select word line, it is understandablethat the memory cell is "0" state, or "1" or "2" state. Read data isstored in the second latch circuit (step A2). During this time, data(corresponding to the column addresses A0, A1, A2, . . . , A254, A255)stored in the first latch circuit is output to the external section ofthe chip through the IO1 (step A3).

Finally, if Vp3 is applied to the select word line, it is understandablethat the memory cell is "0" state, "1", "2", or "3" state. As a result,two-bit data stored in the memory cell is read. Data (corresponding tothe column addresses A256, A257, . . . , A510, A511) is stored in thesecond latch circuit (step A4). Data (corresponding to the columnaddresses A0, A1, A2, . . . , A254, A255) stored in the first latchcircuit is output to the external section of the chip. Thereafter, data(corresponding to the column addresses A0, A1, A2, . . . , A254, A255)is stored in the second latch circuit is output to the external sectionof the chip through the IO2 (step A5).

In the above-mentioned reading system, just after data is first sensed,and stored in the first latch circuit, read data can be output to theexternal section. As a result, the entire read time is greatly shorterthan the conventional case. That is, the entire read time, which is thesame as the case of the binary memory cell, can be obtained. In theconventional case, the word line voltage is changed three times, anddata is output to the external section of the chip. In this embodiment,a predetermined read voltage is first applied to the word line so as toread the memory cell. Then, data is output to the external section ofthe chip. As a result, the reading speed can be improved.

The following will specifically explain an operation with reference toan operation timing chart.

FIG. 29 is a specific example of a circuit 3. This embodiment shows thecase of the four-value storage. Write/read data is latched by flip-flopsFF1 and FF2. The flip-flop FF1 comprises n-channel MOS transistors Qn21,Qn22, Qn23 and p-channel MOS transistors Qp9, Qp10, Qp11. The flip-flopFF2 comprises n-channel MOS transistors Qn29, Qn30, Qn31 and p-channelMOS transistors Qp16, Qp17, Qp18. These flip-flops FF1 and FF2 areoperated as sense amplifiers.

Flip-flops FF1 and FF2 latch data, "write "0" data or write "1" data orwrite "2" data, or write "3" data?", as write data. Also, the flip-flopsFF1 and FF2 latch data, "the memory cell holds "0" data, the memory cellholds "1", the memory cell holds "2" data, or the memory cell holds "3"data?" as read data. Data I/O lines IOA and IOB and the flip-flop FF1are connected to each other through n-channel MOS transistors Qn28,Qn27. Data I/O lines IOC and IOD and the flip-flop FF2 are connected toeach other through n-channel MOS transistors Qn35, Qn36.

Data I/O lines IOA, IOB, IOC, IOC are also connected to a data I/Obuffer 4 of FIG. 24. Gates of the n-channel MOS transistors Qn 27 andQn28 are connected to an NAND logic circuit G3 and the output of thecolumn address decoder comprising an inverter I5. CENB1 is activated, sothat read data stored in the flip-flop FF1 is output to IOA and IOB.Gates of the n-channel MOS transistors Qn 35 and Qn36 are connected toan NAND logic circuit G2 and the output of the column address decodercomprising an inverter I4. CENB2 is activated, so that read data storedin the flip-flop FF2 is output to IOC and IOD.

The n-channel MOS transistors Qn26 and Qn34 equalize the flip-flops FF1and FF2, respectively, in a state that signals ECH1 and ECH2 are set to"H." The n-channel MOS transistors Qn24 and Qn32 control the connectionbetween the flip-flops FF1 and FF2 and MOS capacitor Qd1. The n-channelMOS transistors Qn25 and Qn33 control the connection between theflip-flops FF1 and FF2 and MOS capacitor Qd2.

A circuit comprising p-channel MOS transistors Qp12C and Qp13C changesthe gate voltage of MOS capacitor Qd1 by an activation signal VRFYBAC inaccordance with data of flip-flop FF1. A circuit comprising p-channelMOS transistors Qp14C and Qp15C changes the gate voltage of MOScapacitor Qd2 by an activation signal VRFYBBC in accordance with data offlip-flop FF1. A circuit comprising p-channel MOS transistors Qp12C,Qp19C, and Qp20C changes the gate voltage of MOS capacitor Qd1 by anactivation signal VRFYBA2C in accordance with data of flip-flops FF1 andFF2.

A circuit comprising p-channel MOS transistors Qp14C, Qp21C, and Qp22Cchanges the gate voltage of MOS capacitor Qd2 by an activation signalVRFYBB2C in accordance with data of flip-flops FF1 and FF2. A circuitcomprising n-channel MOS transistors Qn1C and Qn2C changes the gatevoltage of MOS capacitor Qd1 by an activation signal VRFYBA1C inaccordance with data of flip-flop FF2. A circuit comprising n-channelMOS transistors Qn3C and Qn4C changes the gate voltage of MOS capacitorQd2 by an activation signal VRFYBB1C in accordance with data offlip-flop FF2.

Each of MOS capacitors Qd1 and Qd2 comprises a depletion-type n-channelMOS transistor to be sufficiently smaller than the bitline capacitor. Ann-channel MOS transistor Qn37 charges MOS capacitor Qd1 to a voltage VAby a signal PREA. An n-channel MOS transistor Qn38 charges MOS capacitorQd2 to a voltage VB by a signal PREB. N-channel MOS transistors Qn39 andQn40 control the connection between a data circuit and bitlines BLa andBLb by signals BLCA and BLCB, respectively. The circuit, which comprisesn-channel MOS transistors Qn37 and Qn38, uses as a bitline voltagecontrol circuit.

The first data batch detective MOS transistor unit, which comprisesn-channel MOS transistors Qn7C and Qn8C, detects the write operationcompletion of the memory in which "1" is written. The second data batchdetective MOS transistor unit, which comprises n-channel MOS transistorsQn9C and Qn10C, detects the write operation completion of the memory inwhich "2" is written.

The following shows a case in which a control gate CG2A is selected.

<Read Operation>

FIG. 30 shows a read method of this embodiment. At time tw1, voltages VAand VB are set to 1.8V and 1.5V, respectively, and bitlines BLa and BLbare set to 1.8V, and 1.5V, respectively. Then, the levels of signalsPREA and PREB are set to "L", so that the bitlines BLa and BLb arefloated. At time tw2, the control gate CG2A whose block is selected bythe control gate and select gate drive circuit 9, is set to 1V. Then,non-select control gates CG1A, SG3A, CG4A and select gates SG1A and 2G2Aare set to VCC. If the threshold value of the selected memory cell isbelow 1V, the bitline voltage is set to be lower than 1.5V. If thethreshold value of the selected memory cell is over 1V, the bitlinevoltage of 1.8V is maintained as it is. Thereafter, the levels ofsignals SAN2 and SAP2 are set to "L" and "H", respectively. Then, theflip-flop FF2 is non-activated, and a signal ECH2 is set to an "H" levelso as to be equalized. At time tw3, the levels of signals RV2A and RV2Bare set to "H" Level. At time tw4, the levels of signals SAN2 and SAP2are set to "H" and "L", respectively, so that the voltage of node N1 issensed and latched. As a result, the flip-flop FF2 senses "data ofmemory cell is "0" or "1", "2" or "3"", and sensed data is latched.

At time tw5, data stored in the flip-flop FF2 is output to the externalsection of the chip when CENB2 is activated.

Then, it is checked whether the threshold value of the memory cell isover 1V or below 0V. The bitline BLa and the dummy bitline BLb areprecharged to 1.8V and 1.5V, respectively, at time tw5. Thereafter, theyare floated. At time tw6, the selected control gate is set to 0V. If thethreshold value of the selected memory cell is below 0V, the bitlinevoltage is set to be lower than 1.5V. If the threshold value of theselected memory cell is over 0V, the bitline voltage of 1.8V ismaintained as it is. Thereafter, the levels of signals SAN1 and SAP1 areset to "L" and "H", respectively. Then, the flip-flop FF1 isnon-activated, and a signal ECH1 is set to an "H" level so as to beequalized. At time tw7, the levels of signals RV1 A and RV1 B are set to"H" level. At time tw8, the levels of signals SAN1 and SAP1 are set to"H" and "L", respectively, so that the voltage of node N1 is sensed andlatched. As a result, the flip-flop FF1 senses "data of memory cell is"0" or "1", 2" or "3"", and sensed data is latched. At this time, thepotentials of nodes N3C and N5C of the flip-flops FF1 and FF2 can beshown by the following Table 7.

                  TABLE 7                                                         ______________________________________                                                  "0" "1"          "2"   "3"                                          ______________________________________                                        N3C         L     H            H   H                                          N5C         L     L            H   H                                          ______________________________________                                    

Finally, data ""0", "1", "2" or "3"" written to the memory cell issensed. At time tw9, the bitline BLa, and the dummy bitline BLb areprecharged to 1.8V, and 1.5V, respectively. Thereafter, they arefloated. At time tw10, the selected control gate is set to 2V. If thethreshold volts of the selected memory cell is below 2V, the bitlinevoltage is set to be lower than 1.5V. If the threshold voltage of theselected memory cell is over 2V, the bitline voltage of 1.8V ismaintained as it is. At time tw11, VRFYBA2C is set to "0V."

As is obvious from Table 7, only when data is "1", node N5C is set to"Low level" and node N3C is set to "High level" (node N4C is set to "Lowlevel"). As a result, only when data is "1", p-channel MOS transistorsQp12C, Qp19C, Qp20C are turned on, and node N1 is set to VCC.

Thereafter, the levels of signals SAN1 and SAP1 are set to "L" and "H",respectively, and flip-flop FF1 is non-activated. As a result, thesignal ECH1 is set to "H" level, so as to be equalized. At time tw12,the levels of the signals RV1 A an RV1B are set to "H." At time tw13,the levels of signals SAN1 and SAP1 are set to "H" and "L",respectively, so that the voltage of node N1 is sensed and latched. As aresult, the flip-flop FF1 senses "data of memory cell is "0" or "1", "2"or "3"", and sensed data is latched. At time tw14, data stored in theflip-flop FF1 is output to the external section of the chip when CENB1is activated.

As a result of the above read operation, four-value data is latched bythe flip-flops FF1 and FF2 as shown in the following Table 8.

                  TABLE 8                                                         ______________________________________                                                    "0"    "1"        "2"  "3"                                        ______________________________________                                        IOA (N3C)   L      H          L    H                                          IOB (N4C)   H      L          H    L                                          IOC (N5C)   L      L          H    H                                          IOD (N6C)   H      H          L    L                                          ______________________________________                                    

The distribution of the threshold of each data of Table 8 is as follows:

data "0" . . . threshold: 0V or less

data "1" . . . threshold: 0.5V to 0.8V or less

data "2" . . . threshold: 1.5V to 1.8V or less

data "3" . . . threshold: 2.5V to 2.8V or less

During the reading, the levels of the signals VRFYBAC and VRFYBBC areset to "H", and the levels of the signals VRFYBA1C and VRFYBB1C are setto "L." The voltage Vs is set to 0V.

The relationship among data stored in the memory cell, the thresholdvalue, and data I/O lines IOA, IOB, IOC, and IOD in the level afterreading is as shown in Table 8.

<Write Operation>

First of all, write data is loaded onto the flip-flops FF1 and FF2.Thereafter, data "1", "2", and "3" is written at substantially the sametime.

Then, the verify read is performed to check whether data "1", "2", "3"is sufficiently written. If there is a memory cell in which data writeis insufficiently performed, a rewrite is performed. A write operationcompletion detecting circuit detects that all memory cells aresufficiently written, so that the write operation is completed.

The following will explain the write operation and the verify readoperation.

(1) Programming

Before the write operation, input data is converted by the data I/Obuffer 4 so as to be input to the data circuit 3. The relationship amongfour-value data, data I/O lines IOA, IOB, IOC, and IOD is shown as thefollowing Table 9.

                  TABLE 9                                                         ______________________________________                                                    "0"    "1"        "2"  "3"                                        ______________________________________                                        IOA (N3C)   H      H          L    L                                          IOB (N4C)   L      L          H    H                                          IOC (N5C)   H      L          H    L                                          IOD (N6C)   L      H          L    H                                          ______________________________________                                    

It is assumed that the number of data circuits is 256 (page length is256). The first input 256-bit write data is input to the flip-flop FF1through IOA and IOB in a state that the column activation signal CENB1is in an "H" level. Then, write data of 256 bits and the following,which is input from the external section, is input to the flip-flop FF2through IOC and IOD in a state that the column activation signal CENB2is in an "H" level.

As is understood from Tables 8 and 9, data, which is input to theflip-flop FF1 through IOA and IOB and written, is output to theflip-flop FF2 as read data in reading data. Thereafter, read data isoutput to the external section of the chip through IOC and IOD. In otherwords, data, in which write data is input from IOA, is controlled by thedata I/O buffer to be output from IOD. Similarly, data, in which writedata is input from IOB, is controlled by the data I/O buffer to beoutput from IOC.

Data, which is input to the flip-flop FF2 through IOC and IOD and iswritten, is output to the flip-flop FF1 as read data in reading data.Thereafter, read data is output to the external section of the chipthrough IOB and IOA. In other words, data, in which write data is inputfrom IOC, is controlled by the data I/O buffer to be output from IOB.Similarly, data, in which write data is input from IOD, is controlled bythe data I/O buffer to be output from IOA.

The write operation is shown by FIG. 31.

At time t1s, the voltage VA is used as a bitline write control voltageof 1V, and the bitline BLa is set to 1V. In this case, if there occurs aproblem of voltage drop corresponding to the threshold value of then-channel MOS transistor Qn39, a signal BLCA may be boosted.Sequentially, the level of a signal PRE is set to "L", and the bitlineis floated. At time t2s, a signal RV2A is set to 1.5V. As a result, thebitline control voltage of 0V is applied to the bitline from the datacircuit in which data "1" or "3" is stored. It is assumed that thethreshold value of the n-channel MOS transistor Qn32 is 1V. Qn32 isturned "OFF" when data "0" or "2" is written, and Qn32 is turned "ON"when data "1" or "3" is written. At time t3s, VRFYBAC is set to 0V, anda bitline write control voltage VCC is output to the bitline from thecircuit in which data "0" or "1" is stored.

Then, VRFYBA2 is 0V at time t1s, and bitline "1" write potential 2V isoutput to the bitline from the data circuit in which data "1" is stored.As a result, the bitline in which "0" is written is set to VCC, thebitline in which "1" is written is set to 2V, the bitline in which "2"is written is set to 1V, and the bitline in which "3" is written is setto 0V.

At time t4s, the select gate SG1A of the selected block, and the controlgates CG1A to CG4A are set to VCC by the control gate and select gatedriving circuit 2. The select gate SG2A is 0V. Sequentially, theselected control gate CG2A is set to a high voltage VPP (e.g., 20V),non-select control gates CG1A, CG3A, CG4A are set to VM (e.g., 10V). Inthe memory cell corresponding to the data circuit in which data "3" isstored, by a potential difference between the channel potential of 0Vand the VPP of the control gate, an electron is injected to the floatinggate, and the threshold value is increased.

In the memory cell corresponding to the data circuit in which data "2"is stored, by a potential difference between the channel potential of 1Vand the VPP of the control gate, an electron is injected to the floatinggate, and the threshold value is increased. In the memory cellcorresponding to the data circuit in which data "1" is stored, by apotential difference between the channel potential of 2V and the VPP ofthe control gate, an electron is injected to the floating gate, and shethreshold value is increased. The reason why the channel potential is 1Vin the case where "2" is written and the channel potential is 2V in thecase where "1" is written is as follows.

The amount of electrons to be injected is reduced in order of the casein which data "3" is written, the case in which data "2" is written, andthe case in which data "1" is written.

In the memory cell corresponding to the data circuit in which data "0"is stored, since the potential difference between the channel potentialand VPP of the control gate is small, the electron is substantially notinjected to the floating gate. As a result, the threshold value of thememory cell is unchanged. During the write operation, the levels of thesignals SAN1, SAN2, PREB, and BLCB are set to "H", and the levels of thesignals SAP1, SAP2, VRFYGA1C, RV1A, RV1 B, ECH1, ECH2 are set to "L",and the voltage BV is 0V.

(2) Verify Read

After the write operation, it is detected whether or not data issufficiently performed (write verify).

If the memory cell reaches a predetermined threshold value, data of thedata circuit is changed to "0." If the memory cell does not reach thepredetermined threshold value, data of the data circuit is stored, andthe write operation is performed again. The write and the write verifyoperations are repeated until all the memory cells, in which data "1" iswritten, "2" is written and data "3" is written, reach the predeterminedthreshold value.

In this case, as shown in FIG. 8, if the first data batch detective MOStransistor unit detects that all memory cells in which "1" is writtenare completed, "1" verify read is omitted in the following verify read.Similarly, if the second data batch detective MOS transistor unitdetects that all memory cells in which "2" is written are completed, "2"verify read is omitted in the following verify read.

The write verify operation will be explained with reference to FIGS. 32and 33.

(2-1) "1" Verify Read

First of all, it is detected whether or not the memory cell in which "1"is written reaches a predetermined value.

At time t1yc, the voltage VA and VB are set to 1.8V and 1.5V,respectively, and the bitline BLa and BLb are 1.8V and 1.5V,respectively. The levels of the signals BLCA and BLCB are set to "L",the bitline BLa and the MOS capacitor Qd1 is separated from each other.Also, the bitline BLb and the MOS capacitor Qd2 is separated from eachother. The bitlines BLa and BLb are floated. The levels of the signalsPREA and PREB are set "L", and the nodes N1 and N2, serving as gateelectrodes of MOS capacitor Qd1 and Qd2, respectively, are floated.

Sequentially, the control gate CG2A of the block, which is selected bythe control gate and select gate drive circuit 2, is set to 0.5V, thenon-select control gates CG1A, CG3A, CG4A and select gates SG1A, SG2Aare set to VCC. If the threshold value of the selected memory cell isbelow 0.5V, the bitline voltage is lower than 1.5V. If the thresholdvalue of the selected memory cell is over 0.5V, the bitline voltage of1.8V is maintained as it is.

At time t2yc, the levels of the signals BLCA and BLCB are set to "H,"and the potential of the bitline is transferred to N1 and N2.Thereafter, the levels of the signals BLCA and BLCB are set to "L", andthe bitline BLa and the MOS capacitor Qd1 are separated from each other.Also, the bitline BLb and the MOS capacitor Qd2 are separated from eachother. Thereafter, at time t3yc, RV1 A is set to 1.5V. Then, in a caseof write "2" and a case of write "3", node N1 is discharged to 0V. Attime t4yc, if the level of the signal VRFYBA1C is set to "H", then-channel MOS transistor Qn2 is turned "ON" and node N1 is set to VCC inthe data circuit in which write data "0" or "2" is stored. As a result,in a case of write "0" and a case of write "1", node N1 is set to VCC.In a case of write "3", node N1 is set to 0V.

The levels of signals SAN2 and SAP2 are set to "L", and "H",respectively, so that the flip-flop FF2 is non-activated, and the levelof the signal ECH2 is set to "H" so as to be equalized. Thereafter, thelevels of signals RV2A and RV2B are set to "H." Then, the levels of thesignals SAN2 and SAN2 are set to "H", and "L", respectively, again. As aresult, at time t5yc, the voltage of node N1 is latched. Then, only thedata circuit, which stores write data "1", detects whether or not dataof the corresponding memory cell in which "1" is written is sufficientlywritten.

If data of the memory cell is "1", the voltage of the node N1 is sensedand latched by the flip-flop FF2, so that write data is changed to "0."If data of the memory cell is not "1", the voltage of the node N1 issensed and latched by the flip-flop FF2, so that write data "1" isstored. Write data of the data circuit in which "0", "2", or "3" iswritten is not changed.

The write operation completion of the memory cell in which "1" iswritten is detected by the first data batch detective MOS transistorunit of FIG. 29. After "1" verify read, RNDB1 is precharged to VCC. Inthe data circuit in which data "0", "2", or "3" is latched, at least oneof N3C and N3C is set to the "L" level (Table 9). Due to this, at leastone of the n-channel MOS transistors Qn7C and Qn8C is turned off, andRNDB1 is not discharged from the precharge potential.

It is assumed that there is one memory cell In which "1" isinsufficiently written. Since both nodes N3C and N6C of the data circuitare set to the "H" level (table 9), transistors Qn7C and Qn8C are turnedon, and RNDB1 is reduced from the precharge potential.

If all memory cells in which "1" is written are sufficiently written,the node N6C is set to the "L" level. At least one of nodes N3C and N6Cof the first data batch detective MOS transistor unit, which is providedin each of data circuits 10-0, 10-1, . . . , 10-m-1, 10-m, is turnedoff. As a result, RNDB1 maintains the precharge potential, and thecompletion of write data "1" is detected. If write of data "1" is allcompleted, "1" verify read is omitted at the following verify read.

(2-2) "2" Verify Read

Similar to the case of "1" verify read, after precharging the bitlineand the dummy bitline, the selected control gate CG2A is set to 1.5V. Ifthe threshold value of the selected memory cell is below 1.5V, thebitline voltage is lower than 1.5V. If the threshold value of theselected memory cell is over 1.5V, the bitline voltage of 1.8V ismaintained as it is.

At time t6yc, the levels of the signals BLCA and BLCB are set to "H,"and the potential of the bitline is transferred to N1 and N2.Thereafter, the levels of the signals BLCA and BLCB are set to "L", andthe bitline BLa and the MOS capacitor Qd1 are separated from each other.Also, the bitline BLb and the MOS capacitor Qd2 are separated from eachother. Thereafter, at time t7yc, RV2A is set to 1.5V, which is belowVCC.

In a case where the threshold value of the n-channel MOS transistor Qn32is 1V, the transistor Qn32 is turned "ON" and the node N1 is 0V in thedata circuit in which data "3" is written. In the data circuit in whichdata "2" is written, if the memory cell in which "2" is written issufficiently written, the transistor Qn32 is turned "OFF", and node N1is set to 1.5V or more. If the memory cell in which "2" is written isinsufficiently written, the node N1 is below 1.5V. At time t8yc, if thelevel of the signal VRFYBAC Is set to "L", the p-channel MOS transistorQp13 is turned "ON" and the node N1 is VCC in the data circuit in whichdata "0" or "1" is written.

The levels of signals SAN1 and SAP1 are set to "L", and "H",respectively, so that the flip-flop FF1 is non-activated, and the levelof the signal ECH1 is set to "H" so as to be equalized. Thereafter, thelevels of signals RV1 A and RV1 B are set to "H." Then, the levels ofthe signals SAN1 and SAN1 are set to "H", and "L", respectively, again.As a result, at time t9yc, the voltage of node N1 is latched. Then, onlythe data circuit, which stores write data "2", detects whether or notdata of the corresponding memory cell in which "2" is written issufficiently written.

If data of the memory cell is "2", the voltage of the node N1 is sensedand latched by the flip-flop FF1, so that write data is changed to "0."If data of the memory cell is not "2", the voltage of the node N1 issensed and latched by the flip-flop FF1, so that write data "2" isstored. Write data of the data circuit in which "0", "1", or "3" iswritten is not changed.

The write operation completion of the memory cell in which "2" iswritten is detected by the second data batch detective MOS transistorunit of FIG. 29. After "2" verify read, RNDB2 is precharged to VCC. Inthe data circuit in which data "0", "1", or "3" is latched, at least oneof N4C and N5C is set to the "L" level (Table 9). Due to this, at leastone of the n-channel MOS transistors Qn9C and Qn10C is turned off, andRNDB2 is not discharged from the precharge potential.

It is assumed that there is one memory cell in which "2" isinsufficiently written. Since both nodes N4C and N5C of the data circuitare set to the "H" level (Table 9), transistors Qn9C and Qn10 are turneron, and RNDB2 is reduced from the precharge potential.

If all memory cells in which "2" is written are sufficiently written,the node N4C is set to the "L" level. At least one of nodes N4C and N5Cof the second data batch detective MOS transistor unit, Which isprovided in each of data circuits 10-0, 10-1, . . . , 10-m-1, 10-m, isturned off. As a result, RNDB2 maintains the precharge potential, andthe completion of write data "2" is detected. If write of data "2" isall completed, "2" verify read is omitted at the following verify read.

(2-3) "3" Verify Read

After precharging the bitline and the dummy bitline at time t10yc, theselected control gate CG2A is set to 2.5V. If the threshold value of theselected memory cell is below 2.5V, the bitline voltage is lower than1.5V. If the threshold value of the selected memory cell is over 2.5V,the bitline voltage of 1.8V is maintained as it is.

At time t11yc, the levels of the signals BLCA and BLCB are set to "H,"and the potential of the bitline is transferred to N1 and N2. The levelsof the signals BLCA and BLCB are set to "L" again, so that the bitlineBLa and the MOS capacitor Qd1 are separated from each other. Also, thebitline BLb and the MOS capacitor Qd2 are separated from each other. Attime t12yc, if the level of the signal YRFYBA is set to "L", thep-channel MOS transistor Qp13 is turned "ON" and the node N1 is VCC inthe data circuit in which "0" or "1" is stored or the data circuit inwhich "2" is sufficiently written. The levels of signals SAN1 and SAP1are set to "L", and "H", respectively, so that the flip-flop FF1 isnon-activated, and the level of the signal ECH1 is set to "H" so as tobe equalized.

Thereafter, the levels of the signals RV1 A and RV1B are set to "H." Attime t13yc, the levels of the signals SAN1 and SAP1 are set to "H" and"L", respectively, so that the voltage of node N1 is sensed and latched.

Thereafter, as shown in FIG. 33, the conversion of write data is furtherperformed. At time t14yc, the levels of the signals BLCA and BLCB areset to "H," and the potential of the bitline is transferred to N1 andN2. The levels of the signals BLCA and BLCB are set to "L" again, sothat the bitline BLa and the MOS capacitor Qd1 are separated from eachother. Also, the bitline BLb and the MOS capacitor Qd2 are separatedfrom each other.

Thereafter, at time t15yc, if the level of the signal VRFYBA1C is set to"H", the n-channel MOS transistor Qn2C is turned "ON" and the node N1 isVCC in the data circuit in which "0" or "2" is stored or the datacircuit in which "1" is sufficiently written. The levels of signals SAN2and SAP2 are set to "L", and "H", respectively, so that the flip-flopFF2 is non-activated, and the level of the signal ECH2 is set to "H" soas to be equalized.

Thereafter, the levels of the signals RV2A and RV2B are set to "H." Attime t17yc, the levels of the signals SAN2 and SAP2 are set to "H" and"L", respectively, so that the voltage of node N1 is sensed and latched.

Thus, only the data circuit in which "3" write data is stored can detectwhether or not data "3" of the corresponding memory cell is sufficientlywritten. If data of the memory cell is "3", the voltage of the node N1is sensed and latched by the flip-flops FF1 and FF2. Thereby, write datais changed to "0." If data of the memory cell is not "3", the voltage ofthe node N1 is sensed and latched by the flip-flops FF1 and FF2, so thatwrite data "3" is stored. Write data of the data circuit in which "0","1", or "2" is stored is not changed.

During the write verify, the level of the signal VRFYBBC is set to "H",the level of the signal VRFYBB1C is set to "L", and the voltage Vs isset to 0V.

If all selected memory cells reach a predetermined threshold value, dataof the data circuit becomes "0." Specifically, if the write operation iscompleted, the nodes N4C and N6C are set to the "L." By detecting thecompletion of the write operation, it is understood whether or not allselected memory cells reach a predetermined threshold value. Indetecting the completion of the write operation, the write operationcompletion catch detective transistors Qn5c and Qn6c may be used asshown in FIG. 29. After the verify read, VRTC is precharged to VCC.

If there is one memory cell in which data write operation isinsufficiently performed, at least one of the n-channel MOS transistorsQn5C and Qn6C is turned on since at least one of the nodes N4C and N6Cof the data circuit is in the "H" level. Then, VRTC is reduced from theprecharge potential. If all memory cells are sufficiently written, thenodes N4C and N6C of the data circuits 10-0, 10-1, . . . , 10-m-1, 10-mare set to the "L." As a result, since the n-channel MOS transistorsQn5C and Qn6C of the all data circuits are turned off, VRTC maintainsthe precharge potential.

Ninth Embodiment

As shown in FIG. 34, the write operation completion of the memory cellin which "3" is written may be detected. In this case, the writeoperation completion of the memory cell is detected by the third databatch detective MOS transistor unit of FIG. 34. After "3" verify read,RNDB3 is precharged to VCC. In the data circuit in which data "0", "1",or "2" is latched, since at least one of N4C and N6C is set to "L"(Table 9), at least one of the n-channel MOS transistors Qn11C and Qn12Cis turned off, and RNDB3 is not discharged from the precharge potential.

It is assumed that there is one memory cell in which "3" isinsufficiently written. Since both nodes N4C and N6C of the data circuitare set to the "H" level (Table 9), transistors Qn11C and Qn12C areturned on, and RNDB3 is reduced from the precharge potential. If allmemory cells in which "3" is written are sufficiently written, the nodeN4C is set to the "L" level. At least one of nodes N4C and N6C of thethird data batch detective MOS transistor unit, which is provided ineach of data circuits 10-0, 10-1, . . . , 10-m-1, 10-m, is turned off.As a result, RNDB3 maintains the precharge potential, and the completionof write data "3" is detected.

In a case where the write operation of data "3" is completed prior tothe writing of data "1" or "2", the third data batch detective MOStransistor unit may be provided, so that the completion of the writingof "3" can be detected. If all write of "3" is completed, "3" verifyread is omitted at the following verify read.

Tenth Embodiment

The write steps and verify read steps are not limited to the case ofFIG. 8. For example, in a case where the writing of data "2" iscompleted prior to the writing of data "1", the second data batchdetective MOS transistor unit of FIG. 29 and 34 detects the completionof the writing of "2." As a result, at the following verify read, "2"verify read is omitted, and "1" and "3" write operation and "1" verifyread operation and "3" verify read operation may be performed.

Thus, according to this embodiment, the completion of the writing of apredetermined write level can be detected by the circuit for detectingthe data write operation completion of a predetermined level. After thecompletion of the writing of the predetermined write level, the verifyread of the write level is omitted, so that the entire write speed canbe improved. In this case, the write level for detecting the writeoperation completion can be arbitrarily set, and the operation timingcan be also arbitrarily set.

For example, in the embodiment of FIG. 8, the verify read is performedin order of "3" verify read, "2" verify read, and "1" verify read.However, the verify read may be performed in order of "1" verify read,"2" verify read, and "3" verify read. Or, the verify, read may beperformed in order of "2" verify read, "3" verify read, and "1" verifyread.

Eleventh Embodiment

The following embodiments (eleventh to thirteenth embodiments) willexplain EEPROMs having high speed operation and a high density, whichcan be applied to EEPROMS other than the above-mentioned multi-valuestorable nonvolatile semiconductor memory devices (EEPROM).

In the eleventh embodiment, the memory cell units, each having memorycells or memory cells and select transistors, are arranged as shown inFIG. 35 to form a sub-array.

Specifically, one end of each of the memory units is connected to acommon signal line in a state that four memory cell units share acontact. Also, the other end of each of the memory units is connected tothe common signal line in a state that four memory cell units share acontact.

More specifically, one end of an arbitrary memory cell unit (e.g., unit3, the third unit seen from the top of FIG. 35) is connected to a firstcommon signal line (common signal line 1). In this case, four memorycell units 1 to 4 (first to fourth units seen from the top of FIG. 35)share a contact. The other end of the memory cell unit 3 (third unitseen from the top) is connected to a second common signal line (commonsignal line 2). In this case, two memory cell units (fifth and sixthunits seen from the top of FIG. 35) share a word line and contact eachother, and do not come in contact with one end of the above memory cellunit 3. Also, two memory cell units (third and fourth units seen fromthe top of FIG. 35) share a word line and contact each other, and comein contact with one end of the above memory cell unit 3.

In other words, two memory cell units are connected in parallel, so thata plurality of parallel connected units is formed. Then, one end of anarbitrary memory cell unit is connected to the first common signal linein a state that two parallel connected units, which share the word line,come in contact with each other. The other end of the arbitrary memorycell unit is connected to the second signal line in a state that twoparallel connected units, which share the word line and have no contactat one end, come in contact each other.

Thus, the sub-arrays are continuously formed, so that the memory cellarrays are structured as shown in FIG. 36.

As shown in FIGS. 37 and 38, each memory cell unit comprises a memorycell section having memory cells, and select transistors. Memory cellunits A, B, C, and D of FIGS. 37 and 38 correspond to any of the memorycell units 1, 2, 3, and 4 of FIGS. 35 and 36. Specifically, there are 24combinations, for example, A:1, B:2, C:3, D:4, or A:4, B:3, C:1, D:2. InFIG. 38, a threshold value Vt1 of an E-type select gate may be largerthan a threshold value Vt2 of an I type select gate, for example, Vt1=2Vand Vt2=0.5V. In FIG. 37, the threshold value Vt1 of the E-type selectgate and a threshold value of a D-type select gate may be, for example,0.7V and -2V, respectively.

For selecting the memory cell of FIG. 37, there are two types ofvoltages to be applied to select gates SG1, SG2, SG3 of the selectblock. One is a voltage Vsgh (e.g., Vcc=3V) by which E and D-type selectgates are turned on, and the other is a voltage Vsgl (e.g., 0V) by whichthe D-type select gate is turned on but the E-type select gate is turnedoff. Among four memory cell units, for selecting the memory cell unit A,the voltage to be applied to SG2, SG3, SG4 is set to Vsgh, and thevoltage to be applied to SG1 is set to Vsg1. For selecting the memorycell unit B, the voltage to be applied to SG2 is set to Vsg1, and thevoltage to be applied to SG1, SG3, SG4 is set to Vsgh. Similarly, forselecting the memory cell unit C, the voltage to be applied to SG1, SG2,SG4 is set to Vsgh, and the voltage applied to SG3 is set to Vsg1. Forselecting the memory cell unit D, the voltage to be applied to, SG1,SG2, SG3 is set to Vsgh, and the voltage to be applied to SG4 is set toVsg1.

If 0V is applied to the select gate of the non-select block, a bitlinevoltage is not leaked through the non-select block.

In the memory cell units shown in FIG. 38, the method for selecting thememory cell unit is substantially the same as the case of FIG. 37.However, for example, if the threshold value of the E-type select gateis 2V and that of the I type select gate is 0.5V, Vsgl to be applied inthe select block may be 1.5V. As a result, the E-type select gate isturned on, and the I type select gate is turned on.

There are variations of the structure of the memory cell section. Oneexample is shown by FIGS. 39A to 39D. FIG. 39A shows a NOR cell typeEEPROM, FIG. 39B shows an AND cell type EEPROM (H. Kume et al.: IEDMTech. Dig., December. 1992, pp. 991-993). FIG. 39C shows an NAND celltype. The structure shown in FIG. 39D may be used. The present inventionis not limited to the EEPROM. The present invention is useful to theso-called EPROM or a mask ROM.

Twelfth Embodiment

The following will specifically explain the present invention, forexample, an NAND cell type EEPROM.

FIG. 40 is a block diagram showing the basic structure of the NAND celltype EEPROM as the twelfth embodiment of the present invention. In FIG.40, the same reference numerals are added to the same portions common tothe portions of FIGS. 9 and 24. Since the memory cell array 1 is an openbitline system, the memory cell array 1 is divided to memory cell arrays1A and 1B. A sense amplifier 12 serves as latching means to write andread data. A row decoder 9 selects a word line. A column decoder 3selects a bitline. In addition, the NAND cell type EEPROM comprises anaddress buffer 11, an I/O sense amplifier 13, a data I/O buffer 6, and asubstrate potential control circuit 14.

FIG. 41 shows the structure of the memory cell array 1A, and FIG. 42shows the structure of the memory cell array 1B. Unlike the conventionalmemory cell array (FIG. 3), in the memory cell array (FIGS. 41, 42) ofthis embodiment, the select gate of the source line side is notconnected to the source line of the n-type diffusion layer. In thisembodiment, the select gates of both ends of the source line side arebrought into contact with the bitline. As a result, since the bitlinehaving a low resistance serves as a source line at a read time, thereading speed can be improved. Since two bitlines are shared per fourmemory cell columns, the pitch of the bitline is twice as large as theconventional case, so that the bitline can be easily processed.

In the memory cell array of this embodiment, there are provided twothreshold voltages of two select MOS transistors for connecting one NANDcell column to the bitline, Vth1 and Vth2 (Vth1>Vth2). It is assumedthat the select MOS transistor having higher threshold voltage Vth1(e.g., 0.8V) is an E-type transistor and that the select MOS transistorhaving lower threshold voltage Vth1 (e.g., -2V) is a D-type transistor.Regarding the voltages to be applied to the select gates, there are avoltage Vsgh (e.g., 3V) by which both D-type and E-type transistors areturned on (Vsgh>Vt1, Vt2) and a voltage Vsgl (e.g., 0V) by which theD-type transistor is turned on but the E-type transistor is turned off(Vt1>Vsg1>Vt2).

Thus, there are provided two kinds of threshold voltages of the selectMOS transistor and two kinds of voltages to be applied to the selectgates. As a result, in writing and reading data, both ends of one offour NAND cell units sharing a contact can be conductive to twobitlines, and the other memory cell units can be non-conductive.

The following will specifically explain the reading and writing systems.

<Read>

For reading data of memory cell MC31, MC71, . . . , the memory cell unit(3) to the bitlines BL1A, BL3A, . . . , the bitlines BL1A, BL3A, . . . ,are precharged to a bitline read potential VA (e.g., 1.8V), and BL2A,BL4A, . . . , are grounded to 0V. After precharge, the bitlines BL1A,BL3A, . . . , are floated.

The control gate CG1 is set to 0V, and CG2 to CG8 are set to Vcc (e.g.,3V). The select gate SG3 is set to Vsg1, and the select gates SG1, SG2,and SG4 are set to Vsgh. The other select gates and control gates areset to 0V. In this case, select MOS transistors ST11, ST12, ST22, ST23,ST31, ST32, ST41, ST42, ST51, ST542, ST61, ST71, ST72, . . . , connectedto the bitlines BL0A, BL2A, BL4A, . . . , are turned on. Also, selectMOS transistors ST14, ST24, ST34, ST44, ST54, ST64, ST74, ST84, . . . ,connected to the bitlines BL1A, BL3A, BL5A, . . . , are turned on. TheD-type select MOS transistors ST33, ST73, . . . , connected to thebitlines BL1A, BL3A, BL5A, . . . , are turned on. However, the E-typeselect MOS transistors ST13, ST23, ST43, ST53, ST653, ST83, ST93, ST103,. . . , are turned off.

As a result, data written to the memory cells MC31, MC71, . . . , is"1", the precharged bitlines BL1A, BL3A, . . . , are discharged to thegrounded bitlines BL2A, BL4A, . . . , so as to be reduced from theprecharge potential. Thereby, data of the memory cells MC31, MC71, . . ., of the memory cell unit (3) is read to the bitlines BL1A, BL3A, . . .. If data written to the memory cell is "0", the bitlines BL1A, BL3A, .. . , are not discharged, and the precharge potential is maintained.

The E-type select MOS transistors ST13, ST23, ST43, ST53, ST53, ST63,ST83, ST93, . . . , connected to the bitlines BL1A, BL3A, BL5A, . . . ,are turned off. As a result, data of the memory cells MC1, MC21, MC41,MC51, MC61, MC81, MC91, . . . , of the memory cell units (1), (2), and(4) is not read to the bitlines BL1A, BL3A, BL5A.

For reading data of the memory cells MC11, MC51, MC91, . . . , of thememory cell unit (1) to the bitlines BL0A, BL2A, BL4A, BL6A, . . . , theselect gates SG2, SG3, SG4 may be set to Vsgh and SG1 may be set toVsg1. For reading data of the memory cells MC21, MC61, MC101, . . . , ofthe memory cell unit (2) to the bitlines BL0A, BL2A, BL4A, . . . , theselect gates SG1, SG3, SG4 may be set to Vsgh and SG2 may be set toVsg1. For reading data of the memory cells MC41, MC81, . . . , of thememory cell unit (4) to the bitlines BL1A, BL3A, . . . , the selectgates SG1, SG2, SG3 may be set to Vsgh and SG4 may be set to Vsg1.

According to this embodiment, a half number of the bitlines is groundedto be used as the function, which is the same as the conventional sourceline, without using the source line (n-type diffusion layer) of theconventional memory cell array. Then, data of the memory cell is read tothe other half of the bitlines. The bitline, which is formed ofpolysilicon, Al having low resistance, is used in place of theconventional source line, which is formed of n-type diffusion layerhaving resistance. As a result, the reduction of the reading speed,which is caused by the float of the source line, can be prevented.

The following will specifically explain the reading operation withreference to FIG. 43.

FIG. 43 is a timing chart showing a case of reading data written to thememory cells MC31, MC71, . . . , of the memory cell unit (1) of FIG. 41.

The bitlines BL0A, BL2A, BL4A, BL6A, . . . , are connected to the senseamplifier SA1 of FIG. 44. The bitlines BL1A, BL3A, BL5A, . . . , areconnected to the sense amplifier SA2 of FIG. 45. The sense amplifiercomprises a CMOS flip-flop, which is controlled by control signals φPand φN.

First of all, precharge signals PRA1, PRA2, PRB2 are changed to Vcc fromVss (time t0). Then, bitlines BL1A, BL3A, BL5A, . . . , are prechargedto VA2 (e.g., 1.7V), and (dummy) bitlines BL1B, BL3B, BL5B, . . . , areprecharged to VB2 (e.g., 1.5V) (time t1). VA1 is 0V, and the bitlinesBL0A, BL2A, BL4A, BL6A, . . . , are grounded.

After precharging, PRA2 and PRB2 are set to Vss, and the bitlines BL1A,BL3A, BL5A, . . . , are floated. Thereafter, a predetermined voltage isapplied to the select gate and the control gate from the row decoder 8(time t2). If data, which is written to the memory cells MC31, MC71, . .. , of the memory cell unit A(3) is "0", the threshold voltage of thememory cell is positive, and no current flows. The potential of each ofthe bitlines BL1A, BL3A, BL5A, . . . , is set to 1.7V. In the memorycell (3), the control gate CG1 is 0V, CG2 to CG8 are Vcc (e.g., 3V),SG1, SG2, SG4 are 3V (Vsgh), and SG3 is 0V (Vsg1). If data is "1", thecell current flows, and the potential of each of the bitlines BL1A,BL3A, BL5A, . . . , is reduced to 1.5V or less. In this case, since theselect gate SG3 is 0V, the E-type select MOS transistor having SG3 as agate electrode is turned off, and data of the memory cells of the memorycell units (1), (2), and (4) is not transferred to the bitlines. Duringthis time, (dummy) bitlines BL1B, BL3B, BL5B are set to the prechargepotential of 1.5V.

Thereafter, at time t3, φP is 3V, and φN is 0V, and CMOS flip-flop FF isnon-activated. At time t4, φE is 3V, so that CMOS flip-flop FF of SA2 isequalized, and nodes N1 and N2 are set to Vcc2 (e.g., 1.5V). At time t5,SS2, SA, SB is 3V, and the bitline and the sense amplifier are connectedto each other. Thereafter, φN is changed to 3V from 0V, and φP ischanged to 0V from 3V, so that the potential difference between each ofthe bitlines BL1A, BL3A, BL5A, . . . , and each of the bitlines BL1B,BL3B, BL5B, . . . , is amplified (time t6). In other words, if data "0"is written to the memory cell MC31, MC71, . . . , node N1 of SA2 is setto 3V, and node N2 is set to 0V. If data "1" is written to the memorycell MC31, MC71, . . . , node N1 is set to 0V, and node N2 is set to 3V.Thereafter, if a column select signal CSL is changed to 3V from 0V,data, which is latched by the CMOS flip-flop FF, is output to the IO,and /IO (time t7).

The bitlines BL0A, BL2A, BL4A, BL6A, . . . , are grounded to 0V by thereading operation. In other words, the bitlines are grounded on everyother line. The distance between the read bitlines is twice as long asthe case in which the bitline is not grounded. As a result, noise, whichis caused by an inter-bitline capacitance combination, is greatlyreduced. PRB1 is set to Vcc and VB1 is set to 0V by the readingoperation, so that bitlines BL0B, BL2B, BL4B, BL6B, . . . , may begrounded. As a result, noise, which is caused by an inter-bitlinecapacitance combination in amplifying the bitline potential, can bereduced.

FIG. 46 is a timing chart showing a case of reading data written to thememory cells MC11, MC51, MC91, . . . , of the memory cell unit (1) ofFIG. 41.

First of all, precharge signals PRA1, PRA2, PRB1 are changed to Vcc fromVss (time t0). Then, bitlines BL0A, BL2A, BL4A, . . . , are prechargedto VA1 (e.g., 1.7V), and (dummy) bitlines BL0B, BL2B, BL4B, . . . , areprecharged to VB1 (e.g., 1.5V) (time t1). VA2 is 0V, and the bitlinesBL1A, BL3A, BL5A, . . . , are grounded.

After precharging, PRA1 and PRB1 are set to Vss, and the bitlines BL0A,BL2A, BL4A, . . . , are floated. Thereafter, a predetermined voltage isapplied to the select gate and the control gate from the row decoder 8(time t2). In this case, the control gate CG1 is 0V, CG2 to CG8 are Vcc(e.g., 3V), SG2, SG3, SG4 are 3V (Vsgh), and SG1 is 0V (Vsg1). If data,which is written to the memory cells MC11, MC51, MC91, . . . , is "0",the threshold voltage of the memory cell is positive, and no currentflows. The potential of each of the bitlines BL0A, BL2A, BL4A, . . . ,is set to 1.7V. If data is "1", the cell current flows, and thepotential of each of the bitlines BL0A, BL2A, BL4A, . . . , is reducedto 1.5V or less. In this case, since the select gate SG1 is 0V, theE-type select MOS transistor having SG1 as a gate electrode is turnedoff, and data of the memory cells of the memory cell units (2), (3), and(4) is not transferred to the bitlines. During this time, (dummy)bitlines BL0B, BL2B, BL4B are set to the precharge potential of 1.5V.

Thereafter, at time t3, φP is 3V, and φN is 0V, and CMOS flip-flop FF isnon-activated. At time t4, φE is 3V, so that CMOS flip-flop FF of SA1 isequalized, and nodes N1 and N2 are set to Vcc/2 (e.g., 1.5V). At timet5, SS1, SA, SB is 3V, and the bitline and the sense amplifier areconnected to each other. Thereafter, φN is changed to 3V from 0V, and φPis changed to 0V from 3V, so that the potential difference between eachof the bitlines BL0A, BL2A, BL4A, . . . , and each of the bitlines BL0B,BL2B, BL4B, . . . , is amplified (time t6). In other words, if data "0"is written to the memory cell MC11, MC51, MC91, . . . , node N1 of SA1is set to 3V, and node N2 is set to 0V. If data "1" is written thereto,node N1 is set to 0V, and node N2 is set to 3V. Thereafter, if thecolumn select signal CSL is changed to 3V from 0V, data, which islatched by the CMOS flip-flop FF, is output to the IO, and /IO (timet7).

Since the bitlines BL1A, BL3A, BL5A, . . . , are grounded to 0V by thereading operation, noise, which is caused by the inter-bitlinecapacitance combination, can be reduced.

Similarly, FIG. 47 is a timing chart showing a case of reading data ofthe memory cells MC21, M61, MC 101, . . . , of the memory cell unit (2)to the bitlines BL0A, BL2A, BL4A, BL6A, . . . . If SG2 is set to Vsg1,and SG1, SG3, and SG4 are set to Vsgh, the memory cell unit (2) isselected and the memory cell units (1), (3), and (4) are non-selected.

FIG. 48 is a timing chart showing a case of reading data of the memorycells MC41, M81, . . . , of the memory cell unit (4) to the bitlinesBL1A, BL3A, If SG4 is set to Vsg1, and SG1, SG2, and SG3 are set toVsgh, the memory cell unit (4) is selected and the memory cell units(1), (2), and (3) are non-selected.

The timing of the reading operation is arbitrarily set. For example, attime t5, the transfer gate for connecting the bitline and the senseamplifier is turned on, and the potential of the bitline and that of thedummy bitline are transferred to the nodes N1 and N2 of the senseamplifier. Thereafter, the transfer gate may be turned off. In thiscase, since the bitline and the dummy bitline are separated from thesense amplifier, the load capacitance of the sense amplifier is reduced,so that the potentials of nodes N1 and N2 are rapidly determined at thetime of sensing and data latching.

In the above-explained embodiment, for reading data of the memory cellsMC31, MC71, the bitlines BL1A, BL3A, BL5A, . . . , are precharged. Then,the bitlines BL2A, BL4A, . . . , are grounded, so that data of thememory cells is read to the bitlines BL1A, BL3A, BL5A, . . . , Data canbe arbitrarily read to which side of the bitlines connected to both endsof the memory cell unit. For example, for reading data of the memorycells MC31, MC71, . . . , the bitlines BL2A, BL4A, . . . , areprecharged. Then, the bitlines BL1A, BL3A, BL5A, . . . , are grounded.As a result, data of the memory cells may be read to the bitlines BL2A,BL4A, . . . .

<Write>

A write operation of this embodiment will be described as follows.

The following will explain writing steps in a case where data is writtento the memory cells MC31, MC71, . . . , of the memory cell unit (3) ofFIG. 41.

The select gates SG1 and SG2 are set to 0V. The select gate SG1 is usedas a common gate for a plurality of select MOS transistors. The selectgate SG2 is also used as a common gate for a plurality of select MOStransistors. The select MOS transistors having SG1 and SG2 as gateelectrodes are connected in series. At least one of the select MOStransistors is turned off. SG3, SG4, and CG1 to CG8 are set to Vcc, andthe bitlines BL1A, BL3A, BL5A, . . . , are set to Vcc. Then, a channelof a page for write operation is precharged to Vcc-Vth (voltage, whichis smaller than the bitline potential Vcc due to the drop in thethreshold voltage of the select MOS transistor). At this time, SG3 orSG4 may be set to a value more than Vcc, e.g., Vcc+Vth or Vcc+2Vth (Vth:threshold value of E-type select MOS transistor) to transfer Vcc to thechannel without dropping the threshold value. The bitlines BL0A, BL2A,BL4A, . . . , may be set to an arbitrary voltage, e.g., Vcc, 0V.

Thereafter, SG3 is set to Vsgl (e.g., 0V), D-type select MOS transistorsST33, ST73, . . . , are turned on, but E-type select MOS transistors areturned off. As a result, the channels of the memory cell units (1), (2),(4) where no data is written are floated at the potential charged fromthe bitline, that is, Vcc (-Vth). Data to be written to the memory cellsMC31, MC71, . . . , of the memory cell unit (3) is supplied from thebitlines BL1A, BL3A, . . . .

For example, for write data "0" to the memory cell MC31, if the bitlineBL1A is set to 0V, the D-type select MOS transistor ST33 is turned on,so that the channel of the memory cell MC31 is 0V. For write data "1" tothe memory cell MC31, if the bitline BL1A is set to 3V, the gate of theD-type select MOS transistor ST33 is 0V, the drain is 3V (Vcc), thesource is 2.2V (Vcc-Vth) or 3V (Vcc). In this potential state, thethreshold value of the D-type select MOS transistor is set to, e.g.,-1.6V or -2V such that ST33 is turned off. As a result, the D-typeselect MOS transistors ST33, ST73, . . . , are turned off, and thechannel of the memory cell MC31 to which data "1" is written is floatedat Vcc (-Vth). Or, the threshold value of the D-type select MOStransistor may be set to e.g., -5V. In this case, even if the D-typeselect MOS transistor ST33 is not turned off, the source of the D-typeselect MOS transistor ST34 is set to Vcc or Vcc-Vth, the drain is set toVcc, and the gate is set to Vcc. In this potential state, the D-typeselect MOS transistor ST34 may be turned off, and the channel of thememory cell to which data "1" is written may be floated.

The threshold value of the D-type select MOS transistor, that of theE-type select MOS transistor, and the potentials to be applied to theselect gates SG3 and SG4 can be explained as follows.

Specifically, these threshold values and the potentials may be set suchthat the channel of the memory cell where data is written is set to 0Vin the case of write data "0" and the channel is floated in the case ofwrite data "1." These threshold values and the potentials may bearbitrarily set. The bitlines BL0A, BL2A, BL4A, . . . , may be Vcc or0V.

The select gate SG3 is changed from Vcc to Vsgl (voltage, which ishigher than the threshold value of the D-type select MOS transistor butlower than the E-type select MOS transistor, e.g., 0V). Thereafter, thecontrol gates CG1 to CG8 are changed to an intermediate potential VM(about 10V) from Vcc. As a result, the channels of the memory cells ofthe memory cell units (1), (2), (4) where no data is written and thechannel of the memory cells MC31, MC71, . . . , where "1" is written arefloated. These channels are increased to the intermediate potential VM(about 8V) from Vcc (-Vth) by the capacitance combination between thecontrol gate and the channel. The channel of the memory cells MC31,MC71, . . . , where data "0" Is written is 0V since the bitline is 0V.

After these channels are increased to the intermediate potential VM fromVcc (-Vth), the control gate CG1 is increased to a write voltage Vpp(20V) from the intermediate voltage VM. The channels of the memory cellsof the memory cell units (1), (2), (4) where no data is written and thechannel of the memory cells of the memory cell unit where "1" is writtenare intermediate potential (about 8V) The control gate 1 is Vpp (about20V). Due to this, data "0" is not written to these memory cells.However, since the channel of the memory cells where "0" is written is0V and the control gate is Vpp (about 20V), an electron is injected tothe floating gate from the substrate and data "0" is written.

Next, the following will specifically explain the write operation ofthis embodiment with reference to a timing chart. FIG. 49 is a timingchart showing a case in which data is written to the memory cell MC31(MC71, . . . ,) of the memory cell unit (3).

Data to be written to the memory cells MC31, MC71 of the memory cellunit (3) is latched by the sense amplifier (SA2 of FIG. 45). In a casewhere "0" is written, node N1 is 0V and node N2 is 3V. In a case where"1" is written, node N1 is 3V and node N2 is 0V.

When the write operation is started, SG3 and SG4 are set to Vss, andSG1, SG2, and CG1 to CG8 are set to Vcc-Vth or Vcc+2Vth at time t1. Inthis embodiment, in write data to the memory cells MC31, MC71, . . . ,of the memory cell unit (3), no data is written to the memory cells ofthe memory cell units (1), (2), (4). In this example, the channels ofthe memory cell units (1), (2), (4) are charged from the bitlines BL0A,BL2A, BL4A, . . . . In this embodiment, the bitlines BL0A, BL2A, BL4A, .. . , are charged to Vcc from VA1 of the sense amplifier SA1 of FIG. 44.As a result, the channel of the non-select memory cell is charged toVcc-Vth or Vcc. At this time, the channel of the memory cell where datais written may be also charged to Vcc-Vth or Vcc. Regarding a method forcharging the channels of the memory cells of the memory cell units (1),(2), (4) to Vcc (-Vth), the channels may be charged from BL0A, BL2A,BL4A, . . . , or from BL1A, BL3A, BL5A, . . . .

In accordance with data latched by the sense amplifier SA2, Vcc or Vss(0V) is given to the bitlines BL1A, BL3A, BL5A, . . . . As a result, forwrite "0" to the memory cell MC31 after charging the channel of thenon-select memory cell unit, the bitline BL1A is set to 0V, and thechannel of the memory cell MC31 is set to 0V. For write "1" to thememory cell MC31, the bitline BL1A is set to Vcc (e.g., 3V), and thechannel of the memory cell MC31 is set to Vcc (-Vth).

In other words, the select gates SG1 and SG2 are set to Vss, and SG3 isset to Vsgl (e.g., 0V), and SG4 is set to Vcc or Vcc+Vth, or Vcc+2Vth.The select gate SG1 is used as a common gate for a plurality of selectMOS transistors. The select gate SG2 is also used as a common gate for aplurality of select MOS transistors. The select MOS transistors havingSG1 and SG2 as gate electrodes are connected in series. At least one ofthe select MOS transistors is turned off. The select MOS transistorshaving SG3 of the memory cell units (1), (2), (4) where no data write isperformed is E-type are turned off since they are E-type. The channelsof the memory cells of the memory cell units (1), (2), (4) are floatedat Vcc (-Vth).

For write "1" to the memory cells MC31, MC71, . . . , the channels ofthese memory cells are floated since the bitlines BL1A, BL3A, . . . ,are Vcc.

For write "0" to the memory cells MC31, MC71, the channels of thesememory cells are set to 0V since the bitlines BL1A, BL3A, . . . , are0V.

After the select gate SG3 is set to Vsgl (e.g., 0V), the control gatesCG1 to CG8 is changed to the intermediate potential VM (about 10V) fromthe Vcc. As a result, the channels of the memory cells of the memorycell units where no data is written and the channel of the memory cellsMC31, MC71, . . . , where "1" is written are floated. These channels areincreased to the intermediate potential VM (about 8V) from Vcc (-Vth) bythe capacitance combination between the control gate and the channel.The channel of the memory cells MC31, MC71, . . . , where data "0" iswritten is 0V since the bitline is 0V.

After these channels are increased to the intermediate potential VM fromVcc (-Vth), the control gate CG1 is increased to the write voltage Vpp(20V) from the intermediate voltage VM. The channels of the memory cellsof the memory cell units (1), (2), (4) where no data is written and thechannel of the memory cells of the memory cell unit where "1" is writtenare intermediate potential (about 10V). The control gate CG1 is Vpp(about 20V). Due to this, data "0" is not written to these memory cells.However, since the channel of the memory cells where "0" is written is0V and the control gate is Vpp (about 20V), an electron is injected tothe floating gate from the substrate and data "0" is written.

After the completion of the write operation, the control gate, theselect gate, and the bitline are sequentially discharged, and the writeoperation is completed.

Similarly, for write data to the memory cells MC11, MC51, MC91, . . . ,of the memory cell unit (1), the channels of the memory cells of thememory cell units (2), (3), (4) are charged to Vcc (or Vcc-Vth).Thereafter, the select gate SG1 is set to Vsg1, SG2 is set to Vsgh, andSG3, SG4 are set to Vss. Then, the bitlines BL0A, BL2A, BL4A, . . . ,are set to Vcc or Vss, and data is transferred to the memory cells MC11,MC51, MC91, . . . .

Similarly, for write data to the memory cells MC21, MC61, MC101, . . . ,of the memory cell unit (2), the channels of the memory cells of thememory cell units (1), (3), (4) are charged to Vcc (or Vcc-Vth).Thereafter, the select gate SG2 is set to Vsg1, SG1 is set to Vsgh, andSG3, SG4 are set to Vss. Then, the bitlines BL0A, BL2A, BL4A, . . . ,are set to Vcc or Vss, and data is transferred to the memory cells MC21,MC61, MC101, . . . .

Similarly, for write data to the memory cells MC41, MC81, . . . , of thememory cell unit (4), the channels of the memory cells of the memorycell units (1), (2), (3) are charged to Vcc (or Vcc-Vth). Thereafter,the select gate SG4 is set to Vsg1, SG3 is set to Vsgh, and SG1, SG2 areset to Vss. Then, the bitlines BL1A, BL3A, . . . , are set to Vcc orVss, and data is transferred to the memory cells MC41, MC81,

After the completion of the write operation, an verify operation isperformed to check whether or not write operation is sufficientlyperformed (FIG. 50). Similar to the reading time, at the time of verifyread, the select gate SG3 is set to Vsg1, and SG1, SG2, and SG4 are setto Vsgh to select only the memory cell unit (3). After the bitline Isdischarged from the precharge potential, the bitline is recharged inaccordance with write data. Thereafter, the bitline potential is sensed,so that rewrite data is latched by the sense amplifier. The operation ofthe sense amplifier and the recharge of the bitline at the time of theverify operation are specifically described in "IEEE J.Solid-Statecircuit by T. Tanaka, et al., vol. 29, pp. 366-1373, 1994.

In the above document, data is simultaneously written to the memorycells corresponding to 1/4 of the total number of memory cells arrangedin the column direction. In other words, among four memory cell units,the memory cell unit in which data is simultaneously written is onlyone.

According to the twelfth embodiment of this invention, data can besubstantially simultaneously written to two memory units. For example,if the select gates SG1 and SG3 are set to Vsgl (e.g., 0V) and SG2 andSG4 are set to Vsgh, data can be substantially simultaneously written tothe memory cell units (1) and (3). In this case, the E-type select MOStransistor having the select gates SG1 and SG3 as gate electrodes isturned off, and the D-type select MOS transistor is turned on. Writedata of the memory cells MC31, MC71, . . . , of the memory cell unit (3)is transferred from the bitlines BL1A, BL3A, . . . . In other words, inthe case of "0" write, the bitline and the channel of the memory cellare 0V. In the case of "1" write, the bitline is Vcc, and the channel isVcc (-Vth) so as to be floated. Similarly, write data of the memorycells MC11, MC51, MC91, . . . , of the memory cell unit (1) istransferred from the bitlines BL0A, BL2A, BL4A, . . . .

Moreover, for example, if the select gates SG2 and SG4 are set to Vsgland SG1 and SG3 are set to Vsgh, data can He substantiallysimultaneously written to the memory cell units (2) and (4). In thiscase, data is transferred to the memory cells of the memory cell unit(4) from the bitlines BL1A, BL3A, BL5A, . . . , and data is transferredto the memory cells of the memory cell unit (2) from the bitlines BL0A,BL2A, BL4A, . . . .

After the write operation, the verify read is performed to check whetheror not the write operation is sufficiently performed.

In the verify read operation shown in the above-mentioned document, dataof one memory cell is read by use of two bitlines. That is, data of oneof four memory cell units is simultaneously read. To write data of twomemory cell units substantially simultaneously, the verify readoperation is performed twice per one write operation. In the method forwrite data of two memory cell units substantially simultaneously, sincethe verify read is performed in connection with each of memory cellunits, the total amount of time for write data of two memory cell unitsis Tpr+2Tvfy (Tpr: write pulse width, Tvfy: verify read time per onetime). In the method for write data of one memory cell unitsubstantially simultaneously, the total amount of time for write datacorresponding to two memory cell units is about 2 (Tpr-Tvfy). Thus, thewrite operation, which is in accordance with the method for write dataof two memory cell units substantially simultaneously, is faster thanthe write operation, which is in accordance with the method for writedata of one memory cell unit substantially simultaneously.

In the above-mentioned document, the sense amplifier is connected toeach of the bitlines. It is possible to use the so-called common senseamplifier system in which one sense amplifier is connected to twobitlines (FIG. 51). In this case, the timing charts of the writing andreading are substantially the same as the case of the above-mentioneddocument.

According to the present invention, regarding the select MOS transistorssharing one select gate, there can be provided select MOS transistors,which are in the conductive state, and in the non-conductive state.Also, in the memory cells having the same select gate, the select memorycells and the non-select memory cells can be easily realized bypreparing four such select gates.

The threshold voltage of the select MOS transistor and the voltage to beapplied to the select gate can be arbitrarily set. One of thetransistors connected in series to one end of the memory cell has twokinds of threshold voltages, that is, Vtd1, and Vtd2 (Vtd1>Vtd2). Thevoltages to be applied to the select gate are Vsghd (Vsghd>Vtd1) andVsg1d (Vtd1>Vsg1d>Vtd2). The other transistor has two kinds of thresholdvoltages, that is, Vte1, and Vte2 (Vte1>Vte2). The voltages to beapplied to the select gate are Vsghe (Vsghe>Vte1) and Vsgle(Vte1>Vsgle>Vte2) Moreover, one of the transistors connected in seriesto the other end of the memory cell has two kinds of threshold voltages,that is, Vts1, and Vts2 (Vts1>Vts2). The voltages to be applied to theselect gate are Vsghs (Vsghs>Vts1) and Vsgls (Vts1>Vsgs>Vts2). The othertransistor has two kinds of threshold voltages, that is, Vtp1, and Vtp2(Vtp1>Vtp2). The voltages to be applied to the select gate are Vsghp(Vsghp>Vtp1) and Vsglp (Vtp1>Vsglp>Vtp2).

Unlike the case described in the above-mentioned document, it isunnecessary to set Vtd1=Vte1=Vts1=Vtp1, Vtd2=Vte2=Vts2=Vtp2,Vsghd=Vsghe=Vsghs=Vsghp, and vsgld=Vsgle=Vsgls=Vsglp. The thresholdvoltage and the voltage to be applied to the select gate can bearbitrarily set. For example, one of the transistors connected in seriesto one end of the memory cell has two kinds of threshold voltages, thatis, 2.5V and 0.5V. The other transistor has two kinds of thresholdvoltages, that is, 1V and -2V. One of the transistors connected inseries to the other end of the memory cell has two kinds of thresholdvoltages, that is, -1 and -3V. The other transistor has two kinds ofthreshold voltages, that is, 2.8V and -2.5V.

The voltages to be applied to one of two select gates connected inseries to one end of the memory cell may be set to Vsgh=3V, VSg1=1.5V.The voltages to be applied to other select gate may be set to Vsgh=2V,Vsg1=-0.5V. The voltages to be applied to one of two select gatesconnected in series to the other end of the memory cell may be set toVsgh=0V, VSg1=-2V. The voltages to be applied to the other select gatemay be set to Vsgh=4V, Vsg1=-1V.

The threshold voltages of four select MOS transistors connected to oneNAND column may be substantially the same. For example, the thresholdvoltage of the four select MOS transistors connected to one NAND columnis set to 0.8V. The threshold voltage of one of two select MOStransistors connected in series to one end of the other NAND cells usingan electrode gate of the select MOS transistor in common to the NANDcolumn is 0.8V and 2V. The threshold voltage of the other select MOStransistor is 0.8V and -1V. The threshold voltages of two select MOStransistors connected in series to the other end of the memory cells are0.8V and -1V. The voltage to be applied to one of two select gatesconnected in series to one end of the NAND cells is set to Vsgh=3V,Vsg1=1.4V. The voltage to be applied to the other select gate is set toVsgh=3V, Vsg1=0V. The voltage to be applied to one of two select gatesconnected in series to the other end of the NAND cells is set toVsgh=3V, Vsg1=0V. The threshold voltages of the select gate may be, ofcourse, positive or negative values. Also, the voltages to be applied tothe select gates may be negative.

If Vsgh is higher than Vcc, conductance of the select MOS transistor isincreased (i.g., decreased in resistance), so that the cell current,which flows to the NAND cell column, is increased. As a result, thebitline discharging time is reduced, so that the speed of the verifyread is increased. Vsgh may be boosted from Vcc by, for example, aboosting circuit of the chip.

Of the threshold voltages of the select MOS transistors, the highervalue may be set to the voltage, which is more than Vcc, (e.g., 3.5V).In this case, e.g., 4V may be applied to the select gate by the boostingcircuit of the chip such that the select MOS transistor having suchthreshold voltage is turned on at the time of reading or verify read.

As a method for changing the threshold voltage, the following methodscan be considered.

Specifically, the thickness of the oxide film of the gate of the selectMOS transistor is changed. The concentration of impurity materialchannel-doped to the select MOS transistor is changed. Or, it ispossible to make a difference in the threshold voltage by depending onwhether or not impurity material is channel-doped to the select MOStransistor. It is also possible to chance the threshold voltage bychanging the channel length of the select MOS transistor. In otherwords, since the threshold voltage is reduced by a short channel effectin the transistor having a short channel length, this kind of transistormay be used as an I-type transistor or a D-type transistor. Moreover,even if a manufacturing process is not newly added to theabove-mentioned methods, the other manufacturing processes such as achannel dope of the peripheral circuit may be used. In any method, bymaking a difference in the threshold voltage of the select MOStransistor, a predetermined threshold voltage can be obtained by asubstrate bias.

Thirteenth Embodiment

This embodiment shows a case in which the D-type select MOS transistorof FIG. 41 is changed to an I-type select MOS transistor. In otherwords, the threshold voltage of the D-type select MOS transistor of FIG.41 is changed to, for example, 0.5V. The figure of this structure isomitted. If the threshold voltage of the E-type select MOS transistor isset to 2V and the threshold voltage of the I-type select MOS transistoris set to 0.5V, the voltage, by which both the E-type and I-type selectMOS transistors are turned on, may be set to 3V. Moreover, the voltage,by which both the E-type select MOS transistor is turned on but theI-type select MOS transistor is turned off, may be set to 1.5V. Thereading operation and the write operation are performed in substantiallythe same manner as the twelfth embodiment.

There can be considered a method for reducing concentration of thesubstrate to set the lower threshold voltage (I-type) of the select MOStransistors. In the I-type transistor in which concentration of thesubstrate is low, even if the gate voltage is not applied thereto, adepletion layer between the drain and the substrate is expanded if thedrain voltage is applied thereto. As a result, there occurs a problem inwhich the depletion layer between the drain and the substrate and adepletion layer between the source and the substrate can be easilyconnected to each other (punch through). To increase the breakdownvoltage of the punch through of the I-type select MOS transistor, thechannel length L of the I-type select MOS transistor may be increased.

Fourteenth Embodiment

If the threshold voltage of the D-type select MOS transistor of FIG. 41is set to about -8V, it is possible to execute the write method as inthe conventional NAND type EEPROM (the channel of the write non-selectmemory cell is not floated). For example, for write data of the memorycell MC31 of FIG. 41, SG1, SG2 are set to 0V, SG3 is set to 0V, SG isset to VM10 (about 10V), CG1 is set to Vpp, and CG2 to CG8 are set toVM10. For write data "1" BL1A is set to VM8 about 8V). For write data"0", BL1A is set to 0V. As a result, the channel of the memory cell MC31in which "1" is written is charged to the intermediate potential (about8V) from the bitline BL1A.

Regarding the memory units (1), (2), (4) where no write operation isperformed, as shown in the twelfth embodiment, the channel of the memorycells of the memory cell units (1), (2), (4) may be set to Vcc (-Vth)before the write potential is biased to the write memory cell MC31 fromthe bitline BL1A. During the write operation, since SG3 of thenon-select memory cell units (1), (2), (4) is turned off, the channel ofthe memory cells is floated. As a result, as explained in the twelfthembodiment, in boosting the control gate to VM8 or Vpp, the channel ofthe memory cells is set to the write non-select potential (VM8), and "0"write is prevented by the coupling of the control gate and the channel.

The present invention in its broader aspect is not limited to thespecific details and representative devices shown and described herein.Accordingly, various modifications may be made without departing fromthe spirit or scope of the general inventive concept as defined by theappended claims and their equivalents. For example, the presentinvention can be applied to an AND type EEPROM (K. Kume et al.: IEDMTech. Dig., December. 1992, pp. 991-993),a DINOR type EEPROM (S.Kobayashi et al.: ISSSCC Tech. Dig., 1995, pp. 122), or an imaginaryground type array (R. Cemea et al.: ISSSCC Tech. Dig., 1995, pp. 126)other than the above-explained NAND type EEPROM and NOR type EEPROM.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the present invention in its broaderaspects is not limited to the specific details, representative devices,and illustrated examples shown and described herein. Accordingly,various modifications may be made without departing from the spirit orscope of the general inventive concept as defined by the appended claimsand their equivalents.

What is claimed is:
 1. A non-volatile semiconductor memory devicecomprising:a memory cell section including at least one memory cell; afirst signal line transferring data from/to said memory cell section;and a first select transistor arranged between said first signal lineand said memory cell section, whereinin case of a program inhibitoperation, a write unselect voltage is applied to said first signal lineand the write unselect voltage is transferred to a channel of at leastsaid memory cell section by applying a first select gate voltage higherthan the write unselect voltage to a gate of said first selecttransistor, and then a voltage higher than the first select gate voltageis applied to a control gate of said memory cell to generate a writeinhibit channel voltage boosted by a capacitive coupling of the channelof said memory cell with the control gate thereof.
 2. The deviceaccording to claim 1, wherein the first select gate voltage is higherthan the write unselect voltage by a threshold voltage of said memorycell/said first select transistor.
 3. The device according to claim 1,wherein the write unselect voltage is a power supply voltage.
 4. Thedevice according to claim 3, wherein the first select gate voltage ishigher than the write unselect voltage by a threshold voltage of saidmemory cell/said first select transistor.
 5. A non-volatilesemiconductor memory device comprising:a memory cell section includingat least one memory cell; a first signal line transferring data from/tosaid memory cell section; and a first select transistor arranged betweensaid first signal line and said memory cell section, whereinin case of aprogram inhibit operation, a write unselect voltage is applied to saidfirst signal line and the write unselect voltage is transferred to achannel of said memory cell section by applying a first select gatevoltage higher than the write unselect voltage to a gate of said firstselect transistor and a control gate of said memory cell, and then avoltage higher than the first select gate voltage is applied to thecontrol gate of said memory cell to generate a write inhibit channelvoltage boosted by a capacitive coupling of the channel of said memorycell with the control gate thereof.
 6. The device according to claim 5,wherein the first select gate voltage is higher than the write unselectvoltage by a threshold voltage of said memory cell/said first selecttransistor.
 7. The device according to claim 5, wherein the writeunselect voltage is a power supply voltage.
 8. The device according toclaim 7, wherein the first select gate voltage is higher than the writeunselect voltage by a threshold voltage of said memory cell/said firstselect transistor.
 9. A non-volatile semiconductor memory devicecomprising:a memory cell section including a plurality of memory cellswhich are connected in series; a first common signal line transferringdata from/to said memory cell section; and a first select transistorarranged between said first common signal line and said memory cellsection, whereinin case of a program inhibit operation, a wire unselectvoltage is applied to said first common signal line and the writeunselect voltage is transferred to a channel of said memory cell sectionby applying a first select gate voltage higher than the write unselectvoltage to a gate of said first select transistor and control gates ofsaid plurality of memory cells, and then a pass voltage higher than thefirst select gate voltage is applied to the control gates of theunselected memory cells and a program voltage higher than the passvoltage is applied to the control gate of the selected memory cell togenerate a write inhibit channel voltage boosted by a capacitivecoupling of the channel of said plurality of memory cells with thecontrol gates thereof.
 10. The device according to claim 9, wherein thefirst select gate voltage is higher than the write unselect voltage by athreshold voltage of said memory cell/said first select transistor. 11.The device according to claim 9, wherein the write unselect voltage is apower supply voltage.
 12. The device according to claim 11, wherein thefirst select gate voltage is higher than the write unselect voltage by athreshold voltage of said memory cell/said first select transistor. 13.A non-volatile semiconductor memory device comprising:a memory cellsection including a least one memory cell; a first signal linetransferring data from/to said memory cell section; and a first selecttransistor arranged between said first signal line and said memory cellsection, whereinin case of a program inhibit operation, a write unselectvoltage is applied to said first signal line and the write unselectvoltage is transferred to a channel of said memory cell section byapplying a first select gate voltage higher than the write unselectvoltage to a gate of said first select transistor and applying a firstcontrol gate voltage which differs from the first select gate voltage toa control gate of said memory cell, and then a voltage higher than thefirst select gate voltage is applied to the control gate of said memorycell to generate a write inhibit channel voltage boosted by a capacitivecoupling of the channel of said memory cell with the control gatethereof.
 14. The device according to claim 13, wherein the first selectgate voltage is higher than the write unselect voltage by a thresholdvoltage of said first select transistor and the first control gatevoltage is higher than the write unselect voltage by a threshold voltageof said memory cell.
 15. The device according to claim 14, wherein thewrite unselect voltage is a power supply voltage.
 16. The deviceaccording to claim 15, wherein the first select gate voltage is higherthan the write unselect voltage by a threshold voltage of said firstselect transistor and the first control gate voltage is higher than thewrite unselect voltage by a threshold voltage of said memory cell.
 17. Anon-volatile semiconductor memory device comprising:a memory cellsection including a plurality of memory cells which are connected inseries; a first common signal line transferring data from/to said memorycell section; and a first select transistor arranged between said firstcommon signal line and said memory cell section, whereinduring a programoperation, in the case that said memory cell section is write-selected,a write select voltage is applied to said first common signal line, andin the case that said memory cell section is write-inhibited, a writeunselect voltage is applied to said first common signal line, and thewrite unselect voltage is transferred to a channel of saidwrite-inhibited memory cell section by applying a first select gatevoltage higher than the write unselect voltage to a gate of said firstselect transistor and control gates of said plurality of memory cells,and then a pass voltage higher than the first select gate voltage isapplied to the control gates of the unselected memory cells and aprogram voltage higher than the pass voltage is applied to the controlgate of the selected memory cell so that said write-selected memory cellsection is boosted by a capacitive coupling of the channel of saidplurality of memory cells with the control gates thereof.
 18. The deviceaccording to claim 17, wherein the first select gate voltage is higherthan the write unselect voltage by a threshold voltage of said memorycell/said first select transistor.
 19. The device according to claim 17,wherein the write unselect voltage is a power supply voltage.
 20. Thedevice according to claim 19, wherein the first select gate voltage ishigher than the write unselect voltage by a threshold voltage of saidmemory cell/said first select transistor.
 21. The device according toclaim 17, wherein the write select voltage is lower than the writeunselect voltage.
 22. The device according to claim 17, wherein thewrite select voltage is 0V and the write unselect voltage is a powersupply voltage.